\n
\u7edd\u7f18\u6805\u53cc\u6781\u578b\u6676\u4f53\u7ba1\uff08Insulated Gate Bipolar Translator, IGBT\uff09\u662f\u7535\u6c14\u5316\u8f68\u9053\u4ea4\u901a\u88c5\u5907\u4e2d\u8d1f\u8d23\u7535\u80fd\u8f6c\u6362\u7684\u6838\u5fc3\u90e8\u4ef6\u3002\u9ad8\u538b\u5927\u5bb9\u91cfIGBT \u6a21\u5757\u957f\u671f\u8fd0\u884c\u53ef\u9760\u6027\u5bf9\u7275\u5f15\u53d8\u6d41\u5668\u7684\u5b89\u5168\u8fd0\u884c\u81f3\u5173\u91cd\u8981\u3002\u968f\u7740\u8f68\u9053\u4ea4\u901a\u9ad8\u901f\u3001\u91cd\u8f7d\u6280\u672f\u7684\u53d1\u5c55\u548c\u7535\u529b\u7535\u5b50\u88c5\u7f6e\u7eff\u8272\u3001\u667a\u80fd\u8981\u6c42\u7684\u4e0d\u65ad\u63d0\u9ad8\uff0c\u5bf9\u5927\u529f\u7387IGBT \u6a21\u5757\u7684\u6027\u80fd\u4e0e\u53ef\u9760\u6027\u63d0\u51fa\u4e86\u8d8a\u6765\u8d8a\u9ad8\u7684\u8981\u6c42\uff0c\u9700\u8981\u66f4\u9ad8\u7684\u529f\u7387\u5bc6\u5ea6\u3001\u66f4\u9ad8\u7684\u5de5\u4f5c\u6e29\u5ea6\u3001\u66f4\u9ad8\u7684\u8fd0\u884c\u53ef\u9760\u6027\u6765\u6ee1\u8db3\u65b0\u4e00\u4ee3\u7275\u5f15\u52a8\u529b\u7684\u5e94\u7528\u9700\u6c42\u3002<\/span><\/h1>\n\u00a0<\/span><\/p>\n\u9ad8\u538b\u5927\u5bb9\u91cfIGBT \u6a21\u5757\u5185\u90e8\u5f02\u8d28\u6750\u6599\u70ed\u81a8\u80c0\u7cfb\u6570\u5931\u914d\u662f\u6a21\u5757\u75b2\u52b3\u8001\u5316\u5931\u6548\u7684\u4e3b\u8981\u673a\u7406\u3002<\/span>\u4f20\u7edf\u534a\u5bfc\u4f53\u5de5\u827a\u57fa\u4e8e\u94dd\u91d1\u5c5e\u5316\u4e0e\u4e92\u8fde\u5de5\u827a\uff0c\u76f8\u5e94\u7684\u4e3b\u6d41\u5927\u529f\u7387IGBT \u6a21\u5757\u5927\u90fd\u662f\u6cbf\u7528\u94dd\u5de5\u827a\u6280\u672f\uff0c\u5982\u82af\u7247\u8868\u9762\u94dd\u91d1\u5c5e\u5316\u3001\u82af\u7247\u4e92\u8fde\u94dd\u5f15\u7ebf\u952e\u5408\u3001\u529f\u7387\u7aef\u5b50\u4e0e\u9676\u74f7\u886c\u677f\u710a\u7247\u710a\u63a5\u7b49\u3002\u7531\u4e8e\u529f\u7387\u6a21\u5757\u5185\u90e8\u5f02\u8d28\u6750\u6599\u4e4b\u95f4\u4e0d\u53ef\u907f\u514d\u5730\u5b58\u5728\u70ed\u81a8\u80c0\u7cfb\u6570\u5931\u914d\uff0c\u52a0\u4e0a\u94dd\u6750\u6599\u70ed\u81a8\u80c0\u7cfb\u6570\u8f83\u9ad8\uff0c\u5927\u529f\u7387\u6a21\u5757\u5185\u90e8\u56e0\u957f\u671f\u5904\u4e8e\u6e29\u5ea6\u5faa\u73af\u548c\u529f\u7387\u5faa\u73af\u7684\u51b2\u51fb\u800c\u51fa\u73b0\u710a\u70b9\u5f00\u88c2\u3001\u710a\u5c42\u9000\u5316\u73b0\u8c61\uff0c\u5f71\u54cd\u6a21\u5757\u957f\u671f\u5e94\u7528\u7684\u53ef\u9760\u6027\u3002<\/span><\/span><\/h1>\n\u4e00\u3001\u5168\u94dc\u5de5\u827a\u6280\u672f\u7684\u4f18\u52bf<\/span><\/strong><\/span><\/h1>\n\u529f\u7387\u534a\u5bfc\u4f53\u5c01\u88c5\u6280\u672f\u7684\u8fdb\u6b65\u5f88\u5927\u7a0b\u5ea6\u4e0a\u6765\u6e90\u4e8e\u6750\u6599\u4e0e\u5236\u9020\u5de5\u827a\u7684\u53d1\u5c55\u3002\u4e3a\u4e86\u964d\u4f4e\u6a21\u5757\u5f02\u8d28\u6750\u6599\u95f4\u70ed\u81a8\u80c0\u7cfb\u6570\u7684\u5dee\u5f02\uff0c\u63d0\u9ad8\u5176\u529f\u7387\u5faa\u73af\u80fd\u529b\u4e0e\u957f\u671f\u8fd0\u884c\u53ef\u9760\u6027\uff0c\u4e1a\u5185\u63d0\u51fa\u5168\u94dc\u5de5\u827a\u6280\u672f\uff0c\u4e3b\u8981\u5305\u542b\u82af\u7247\u94dc\u91d1\u5c5e\u5316\u3001\u94dc\u5f15\u7ebf\u952e\u5408\u4e92\u8fde\u548c\u6a21\u5757\u94dc\u529f\u7387\u7aef\u5b50\u8d85\u58f0\u710a\u63a5\u4e09\u90e8\u5206\u6280\u672f\u3002<\/span><\/h1>\n
<\/p>\n\u56fe\u00a0 \u5168\u94dc IGBT\u00a0\u6a21\u5757\u5c01\u88c5\u5de5\u827a\u6d41\u7a0b<\/span><\/section>\n\u94dc\u5de5\u827a\u6a21\u5757\u4e0e\u5c01\u88c5\u7ed3\u6784\u76f8\u540c\u7684\u94dd\u5de5\u827a\u6a21\u5757\u76f8\u6bd4\uff0c\u4e3b\u8981\u6709\u4e24\u65b9\u9762\u7684\u6539\u8fdb\u5185\u5bb9\uff1a<\/span><\/section>\n\u9996\u5148\u662f\u5728\u82af\u7247\u8868\u9762\u751f\u957f\u539a\u94dc\u5c42\uff0c\u4e0d\u4ec5\u6709\u5229\u4e8e\u964d\u4f4e\u82af\u7247\u901a\u6001\u635f\u8017\u3001\u6539\u5584\u6563\u70ed\uff0c\u540c\u65f6\u8fd8\u53ef\u4ee5\u7f13\u89e3\u94dc\u5f15\u7ebf\u952e\u5408\u8fc7\u7a0b\u4e2d\u7684\u51b2\u51fb\u529b\uff0c\u63d0\u9ad8\u952e\u5408\u70b9\u7684\u53ef\u9760\u6027\uff1b<\/span><\/section>\n\u5176\u6b21\uff0c\u82af\u7247\u4e4b\u95f4\u7684\u94dc\u5f15\u7ebf\u952e\u5408\u4e92\u8fde\uff0c\u53ef\u4ee5\u964d\u4f4e\u6a21\u5757\u5bc4\u751f\u7535\u963b\u635f\u8017\uff0c\u51cf\u5c0f\u952e\u5408\u5f15\u7ebf\u81ea\u70ed\u6548\u5e94\u7684\u5f71\u54cd\u3002<\/span><\/section>\nInfineon \u516c\u53f8\u63d0\u51fa\u4e86\u5305\u62ecIGBT\u82af\u7247\u94dc\u91d1\u5c5e\u5316\u3001\u94dc\u5f15\u7ebf\u952e\u5408\u7b49\u65b0\u6280\u672f\u7684.XT \u6280\u672f\uff0c\u5e76\u4e14\u901a\u8fc7\u5e94\u7528\u5728\u4e2d\u4f4e\u538b\u6a21\u5757\uff0c\u5bf9\u6bd4\u8bf4\u660e\u8be5\u6280\u672f\u53ef\u4ee5\u5728\u5f88\u5927\u7a0b\u5ea6\u4e0a\u63d0\u9ad8\u6a21\u5757\u7684\u4f7f\u7528\u6548\u7387\u53ca\u5bff\u547d\u3002<\/span><\/section>\n\u7814\u7a76\u8868\u660e\uff0c\u4e0e\u4f20\u7edf\u94dd\u5de5\u827a\u76f8\u6bd4\uff0c\u5168\u94dc\u5de5\u827a\u6a21\u5757\u4e0d\u4ec5\u4f7f\u5bfc\u901a\u635f\u8017\u964d\u4f4e\u4e8610%\u3001\u6d6a\u6d8c\u7535\u6d41\u80fd\u529b\u63d0\u5347\u4e8620%\uff0c\u800c\u4e14\u529f\u7387\u5faa\u73af\u80fd\u529b\u63d0\u9ad8\u4e8616 \u500d\uff0c\u63d0\u5347\u4e86\u529f\u7387\u6a21\u5757\u7684\u8fd0\u884c\u97e7\u6027\u4e0e\u5e94\u7528\u53ef\u9760\u6027\u3002<\/span><\/h1>\n\u4e8c\u3001\u5168\u94dc\u5de5\u827a\u6280\u672f\u4ecb\u7ecd<\/span><\/strong><\/span><\/h1>\n1\u3001\u94dc\u5f15\u7ebf\u5065\u5408<\/strong><\/span><\/h2>\n\u5927\u529f\u7387IGBT \u6a21\u5757\u5c01\u88c5\u7684\u53ef\u9760\u6027\u5728\u5f88\u5927\u7a0b\u5ea6\u4e0a\u53d6\u51b3\u4e8e\u82af\u7247\u4e4b\u95f4\u7684\u5f15\u7ebf\u4e92\u8fde\u5de5\u827a\u53ef\u9760\u6027\u6c34\u5e73\u3002\u56e0\u4e3a\u5f15\u7ebf\u6750\u6599\u53ca\u5176\u952e\u5408\u70b9\u7684\u53ef\u9760\u6027\u76f4\u63a5\u51b3\u5b9a\u4e86\u6a21\u5757\u5e94\u7528\u8fc7\u7a0b\u4e2d\u7684\u529f\u7387\u5faa\u73af\u80fd\u529b\u3002<\/span><\/span><\/h1>\n\u8868 \u94dc\u548c\u94dd\u6750\u6599\u7684\u7269\u7406\u6027\u80fd<\/section>\n
<\/section>\n\u4e0a\u8868\u7ed9\u51fa\u4e86\u94dc\u548c\u94dd\u6750\u6599\u7269\u7406\u6027\u80fd\u6bd4\u8f83\u60c5\u51b5\uff1a<\/span><\/h1>\n\n- \n
\u94dc\u6750\u6599\u7535\u963b\u7387\u662f\u94dd\u768460%\uff0c\u6bd4\u94dd\u5177\u6709\u66f4\u597d\u7684\u5bfc\u7535\u4e0e\u5bfc\u70ed\u6027\u80fd\uff1b<\/span><\/h1>\n<\/li>\n- \n
\u5f39\u6027\u6a21\u91cf\u662f\u94dd\u6750\u6599\u76842\uff5e3 \u500d\uff0c\u5ef6\u5c55\u6027\u597d\u4e14\u6613\u4e8e\u952e\u5408\u64cd\u4f5c\uff1b<\/span><\/h1>\n<\/li>\n- \n
\u6bd4\u94dd\u6709\u66f4\u9ad8\u7684\u6297\u7535\u8fc1\u79fb\u6027\u80fd<\/span><\/h1>\n<\/li>\n<\/ul>\n\u91c7\u7528\u94dc\u6765\u66ff\u4ee3\u94dd\u4f5c\u4e3a\u82af\u7247\u91d1\u5c5e\u5316\u548c\u4e92\u8fde\u5f15\u7ebf\u7684\u6750\u6599\u6709\u5229\u4e8e\u964d\u4f4eIGBT \u529f\u7387\u635f\u8017\uff0c\u63d0\u5347\u82af\u7247\u6563\u70ed\u80fd\u529b\uff0c\u63d0\u9ad8\u6a21\u5757\u529f\u7387\u5bc6\u5ea6\u548c\u53ef\u9760\u6027\u3002<\/span><\/h1>\n
<\/p>\n\u56fe\u00a0\u94dd\u5f15\u7ebf\u952e\u5408\u70b9\u529f\u7387\u5faa\u73af\u540e\u5931\u6548<\/span><\/section>\n<\/h1>\n\u76ee\u524d\u5927\u529f\u7387\u6a21\u5757\u5c01\u88c5\u4e3b\u8981\u91c7\u7528\u94dd\u7ebf\u6216\u94dd\u5e26\u6750\u6599\uff0c\u901a\u8fc7\u8d85\u58f0\u952e\u5408\u5de5\u827a\u6765\u5b9e\u73b0\u82af\u7247\u4e4b\u95f4\u7684\u4e92\u8fde\u3002\u5728\u957f\u671f\u529f\u7387\u5faa\u73af\u8fc7\u7a0b\u4e2d\uff0c\u94dd\u5f15\u7ebf\u4e0e\u82af\u7247\u952e\u5408\u70b9\u6839\u90e8\u9644\u8fd1\u4f1a\u51fa\u73b0\u5f00\u88c2\u73b0\u8c61\u3002<\/span><\/span>\u94dd\u7684\u70ed\u81a8\u80c0\u7cfb\u6570\u6bd4\u94dc\u9ad850%\uff0c\u94dd\u7845\u4e4b\u95f4\u70ed\u81a8\u80c0\u7cfb\u6570\u5931\u914d\u66f4\u4e25\u91cd\uff0c\u91c7\u7528\u7845\u94dd\u5408\u91d1\uff081.2% Si-2%Al\uff09\u53ef\u4ee5\u5728\u4e00\u5b9a\u7a0b\u5ea6\u4e0a\u6539\u5584\u4e24\u79cd\u6750\u6599\u7684\u70ed\u81a8\u80c0\u7cfb\u6570\u5931\u914d\u800c\u5f15\u8d77\u7684\u6750\u6599\u6027\u80fd\u9000\u5316\uff0c\u540c\u65f6\u6539\u5584\u6297\u7535\u8fc1\u79fb\u80fd\u529b\u548c\u952e\u5408\u8d28\u91cf\uff0c\u4f46\u7845\u94dd\u5408\u91d1\u4f1a\u5f71\u54cd\u5bfc\u7535\u3001\u5bfc\u70ed\u6027\u80fd\uff1b\u901a\u8fc7\u63d0\u9ad8\u952e\u5408\u5f3a\u5ea6\uff0c\u53ef\u4ee5\u6539\u5584\u952e\u5408\u70b9\u7684\u7ed3\u5408\u8d28\u91cf\uff0c\u4f46\u5b58\u5728\u82af\u7247\u635f\u5bb3\u7684\u98ce\u9669\u3002<\/span><\/section>\n
<\/p>\n\u56fe\u00a0\u94dd\u7ebf\u548c\u94dc\u7ebf\u952e\u5408\u63a8\u529b\u6d4b\u8bd5<\/span><\/section>\n\u4f20\u7edf\u94dd\u4e92\u8fde\u5df2\u7ecf\u63a5\u8fd1\u5176\u5de5\u827a\u6781\u9650\uff0c\u94dc\u5177\u6709\u4f4e\u7535\u963b\u7387\u3001\u9ad8\u5bfc\u70ed\u7387\u3001\u4f4e\u70ed\u81a8\u80c0\u7cfb\u6570\u53ca\u9ad8\u8f7d\u6d41\u80fd\u529b\uff0c\u94dc\u7ebf\u7684\u6297\u7535\u8fc1\u79fb\u6027\u80fd\u589e\u52a0\u4e86\u7ea6\u4e24\u4e2a\u6570\u91cf\u7ea7\uff0c\u8fd9\u4e9b\u7269\u7406\u7279\u6027\u90fd\u6709\u5229\u4e8e\u63d0\u5347\u5668\u4ef6\u7684\u53ef\u9760\u6027\u3002\u91c7\u7528\u94dc\u5f15\u7ebf\u53d6\u4ee3\u4f20\u7edf\u7684\u94dd\u5f15\u7ebf\u5b9e\u73b0\u952e\u5408\u4e92\u8fde\uff0c\u76f8\u540c\u7ebf\u5f84\u7684\u94dc\u5f15\u7ebf\u8f7d\u6d41\u80fd\u529b\u53ef\u4ee5\u63d0\u9ad870%\uff0c\u662fIGBT \u6280\u672f\u53d1\u5c55\u65b9\u5411\uff0c\u5c24\u5176\u662f\u5728\u8f68\u9053\u4ea4\u901a\u3001\u7535\u529b\u7cfb\u7edf\u7b49\u9ad8\u7aef\u5e94\u7528\u9886\u57df\u3002<\/span><\/h1>\n<\/h2>\n2\u3001\u82af\u7247\u7684\u94dc\u91d1\u5c5e\u5316<\/strong><\/span><\/h2>\n\u8981\u5b9e\u73b0\u94dc\u5f15\u7ebf\u7684\u4e92\u8fde\uff0c\u9996\u5148\u5fc5\u987b\u786e\u4fdd\u82af\u7247\u8868\u9762\u7684\u91d1\u5c5e\u5316\u7535\u6781\u662f\u94dc\uff0c\u56e0\u6b64\u82af\u7247\u94dc\u91d1\u5c5e\u5316\u662f\u94dc\u5f15\u7ebf\u952e\u5408\u4e92\u8fde\u7684\u57fa\u7840\u3002\u7531\u4e8e\u94dc\u6bd4\u94dd\u7535\u963b\u7387\u66f4\u4f4e\u4e14\u5bfc\u70ed\u7cfb\u6570\u8f83\u9ad8\uff0c\u56e0\u800c\u82af\u7247\u8868\u9762\u7684\u539a\u94dc\u91d1\u5c5e\u5c42\u6709\u5229\u4e8e\u964d\u4f4e\u82af\u7247\u901a\u6001\u635f\u8017\u3001\u63d0\u9ad8\u82af\u7247\u8868\u9762\u70ed\u5bb9\u5e76\u6539\u5584\u6563\u70ed\u73af\u5883\uff0c<\/span>\u94dc\u5de5\u827aFRD \u82af\u7247\u7684\u8fd0\u884c\u97e7\u6027\u8f83\u94dd\u5de5\u827a\u82af\u7247\u6709\u5927\u5e45\u63d0\u5347\u3002<\/span><\/span><\/span><\/h1>\n<\/h1>\n\u94dc\u79bb\u5b50\u5728\u82af\u7247\u5185\u90e8\u662f\u4e00\u79cd\u6709\u5bb3\u6742\u8d28\u4ee5\u53ca\u5de5\u827a\u5e73\u53f0\u517c\u5bb9\u6027\u7b49\u95ee\u9898\uff0c\u963b\u788d\u4e86\u94dc\u5de5\u827a\u5728IGBT \u7b49\u529f\u7387\u5668\u4ef6\u5236\u9020\u4e2d\u7684\u5e94\u7528\u53d1\u5c55\u3002\u56e0\u6b64\uff0c\u4e3a\u4e86\u9632\u8303\u94dc\u91d1\u5c5e\u79bb\u5b50\u8fdb\u5165\u82af\u7247\u5185\u90e8\uff0c\u987b\u5728\u94dc\u91d1\u5c5e\u5c42\u4e0e\u7845\u82af\u7247\u4e4b\u95f4\u5f15\u5165\u4e00\u5c42\u963b\u6321\u5c42\u3002\u96be\u7194\u91d1\u5c5e\u53ca\u5176\u6c2e\u5316\u7269\u5982W\u3001Ti\/TiN\u3001Ta\/TaN \u7b49\uff0c\u7531\u4e8e\u5176\u826f\u597d\u7684\u5bfc\u7535\u6027\u3001\u70ed\u7a33\u5b9a\u6027\u7b49\u4f18\u70b9\u88ab\u89c6\u4e3a\u7406\u60f3\u7684\u963b\u6321\u5c42\u6750\u6599\u3002<\/span><\/span><\/span><\/section>\n
<\/p>\n\u56fe \u94dc\u91d1\u5c5e\u5316\u00a0IGBT\u00a0\u82af\u7247\u622a\u9762<\/span><\/section>\n\u91d1\u5c5e\u53ca\u5176\u6c2e\u5316\u7269\u7684\u590d\u5408\u7ed3\u6784\uff0c\u5982Ti\/TiN\u3001Ta\/TaN \u7b49\u7ed3\u6784\u66f4\u4e3a\u81f4\u5bc6\uff0c\u5bf9\u94dc\u79bb\u5b50\u7684\u963b\u6321\u6548\u679c\u66f4\u597d\uff0c\u5728\u963b\u6321\u5c42\u4e0a\u901a\u8fc7PVD \u6c89\u79ef\u4e00\u5c42\u8584Cu \u4f5c\u4e3a\u7535\u9540\u7684\u7c7d\u6676\u5c42\uff0c\u7136\u540e\u518d\u8fdb\u884c\u539a\u94dc\u7535\u9540\u3002\u4e3a\u4e86\u9632\u6b62\u94dc\u7684\u6c27\u5316\uff0c\u8868\u9762\u518d\u6c89\u79ef\u8584\u5c42\u6297\u6c27\u5316\u7684\u91d1\u5c5e\uff0c\u5982Ni\/Pd\/Au \u7b49\u3002<\/span><\/section>\n\u82af\u7247\u94dc\u91d1\u5c5e\u5316\u57fa\u4e8e\u4f20\u7edf\u94dd\u5de5\u827a\u6d41\u7a0b\uff0c\u4f46\u6bd4\u94dd\u91d1\u5c5e\u5316\u5de5\u827a\u8981\u590d\u6742\u5f88\u591a\uff0c\u4e0d\u4ec5\u9700\u8981\u6539\u53d8\u8868\u9762\u91d1\u5c5e\u6750\u6599\u4e0e\u7ed3\u6784\uff0c\u800c\u4e14\u6d41\u7a0b\u66f4\u957f\uff0c\u5176\u5de5\u827a\u6d41\u7a0b\u5982\u4e0b\u56fe\u6240\u793a\u3002<\/span><\/section>\n<\/section>\n
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<\/section>\n\u56fe \u4e0d\u540c\u710a\u63a5\u5de5\u827a\u6bcd\u7ebf\u7aef\u5b50\u526a\u5207\u5f3a\u5ea6\u6bd4\u8f83<\/span><\/section>\n\u4e0e\u4f20\u7edf\u94dd\u5de5\u827a\u6280\u672f\u76f8\u6bd4\uff0c\u94dc\u5de5\u827aIGBT \u6a21\u5757\u5177\u6709\u66f4\u4f4e\u7684\u901a\u6001\u635f\u8017\u3001\u66f4\u9ad8\u6297\u6d6a\u6d8c\u7535\u6d41\u80fd\u529b\u548c\u66f4\u957f\u529f\u7387\u5faa\u73af\u5bff\u547d\uff0c\u66f4\u9002\u5408\u4e8e\u5de5\u51b5\u6076\u52a3\u7684\u7275\u5f15\u53d8\u6d41\u5668\u7b49\u5e94\u7528\u9886\u57df\u3002<\/span><\/section>\n\u6587\u7ae0\u6765\u6e90\uff1a\u5218\u56fd\u53cb, \u7f57\u6d77\u8f89, \u5f20\u9e3f\u946b, \u738b\u5f66\u521a, \u6f58\u662d\u6d77. \u57fa\u4e8e\u5168\u94dc\u5de5\u827a\u7684750A\/6500V\u9ad8\u6027\u80fdIGBT\u6a21\u5757[J]. \u7535\u5de5\u6280\u672f\u5b66\u62a5, 2020, 35(21): 4501-4510.<\/span><\/section>\n\n
\n
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<\/p>\n\u56fe\u00a0 \u5168\u94dc IGBT\u00a0\u6a21\u5757\u5c01\u88c5\u5de5\u827a\u6d41\u7a0b<\/span><\/section>\n\u94dc\u5de5\u827a\u6a21\u5757\u4e0e\u5c01\u88c5\u7ed3\u6784\u76f8\u540c\u7684\u94dd\u5de5\u827a\u6a21\u5757\u76f8\u6bd4\uff0c\u4e3b\u8981\u6709\u4e24\u65b9\u9762\u7684\u6539\u8fdb\u5185\u5bb9\uff1a<\/span><\/section>\n\u9996\u5148\u662f\u5728\u82af\u7247\u8868\u9762\u751f\u957f\u539a\u94dc\u5c42\uff0c\u4e0d\u4ec5\u6709\u5229\u4e8e\u964d\u4f4e\u82af\u7247\u901a\u6001\u635f\u8017\u3001\u6539\u5584\u6563\u70ed\uff0c\u540c\u65f6\u8fd8\u53ef\u4ee5\u7f13\u89e3\u94dc\u5f15\u7ebf\u952e\u5408\u8fc7\u7a0b\u4e2d\u7684\u51b2\u51fb\u529b\uff0c\u63d0\u9ad8\u952e\u5408\u70b9\u7684\u53ef\u9760\u6027\uff1b<\/span><\/section>\n\u5176\u6b21\uff0c\u82af\u7247\u4e4b\u95f4\u7684\u94dc\u5f15\u7ebf\u952e\u5408\u4e92\u8fde\uff0c\u53ef\u4ee5\u964d\u4f4e\u6a21\u5757\u5bc4\u751f\u7535\u963b\u635f\u8017\uff0c\u51cf\u5c0f\u952e\u5408\u5f15\u7ebf\u81ea\u70ed\u6548\u5e94\u7684\u5f71\u54cd\u3002<\/span><\/section>\nInfineon \u516c\u53f8\u63d0\u51fa\u4e86\u5305\u62ecIGBT\u82af\u7247\u94dc\u91d1\u5c5e\u5316\u3001\u94dc\u5f15\u7ebf\u952e\u5408\u7b49\u65b0\u6280\u672f\u7684.XT \u6280\u672f\uff0c\u5e76\u4e14\u901a\u8fc7\u5e94\u7528\u5728\u4e2d\u4f4e\u538b\u6a21\u5757\uff0c\u5bf9\u6bd4\u8bf4\u660e\u8be5\u6280\u672f\u53ef\u4ee5\u5728\u5f88\u5927\u7a0b\u5ea6\u4e0a\u63d0\u9ad8\u6a21\u5757\u7684\u4f7f\u7528\u6548\u7387\u53ca\u5bff\u547d\u3002<\/span><\/section>\n\u7814\u7a76\u8868\u660e\uff0c\u4e0e\u4f20\u7edf\u94dd\u5de5\u827a\u76f8\u6bd4\uff0c\u5168\u94dc\u5de5\u827a\u6a21\u5757\u4e0d\u4ec5\u4f7f\u5bfc\u901a\u635f\u8017\u964d\u4f4e\u4e8610%\u3001\u6d6a\u6d8c\u7535\u6d41\u80fd\u529b\u63d0\u5347\u4e8620%\uff0c\u800c\u4e14\u529f\u7387\u5faa\u73af\u80fd\u529b\u63d0\u9ad8\u4e8616 \u500d\uff0c\u63d0\u5347\u4e86\u529f\u7387\u6a21\u5757\u7684\u8fd0\u884c\u97e7\u6027\u4e0e\u5e94\u7528\u53ef\u9760\u6027\u3002<\/span><\/h1>\n\u4e8c\u3001\u5168\u94dc\u5de5\u827a\u6280\u672f\u4ecb\u7ecd<\/span><\/strong><\/span><\/h1>\n1\u3001\u94dc\u5f15\u7ebf\u5065\u5408<\/strong><\/span><\/h2>\n\u5927\u529f\u7387IGBT \u6a21\u5757\u5c01\u88c5\u7684\u53ef\u9760\u6027\u5728\u5f88\u5927\u7a0b\u5ea6\u4e0a\u53d6\u51b3\u4e8e\u82af\u7247\u4e4b\u95f4\u7684\u5f15\u7ebf\u4e92\u8fde\u5de5\u827a\u53ef\u9760\u6027\u6c34\u5e73\u3002\u56e0\u4e3a\u5f15\u7ebf\u6750\u6599\u53ca\u5176\u952e\u5408\u70b9\u7684\u53ef\u9760\u6027\u76f4\u63a5\u51b3\u5b9a\u4e86\u6a21\u5757\u5e94\u7528\u8fc7\u7a0b\u4e2d\u7684\u529f\u7387\u5faa\u73af\u80fd\u529b\u3002<\/span><\/span><\/h1>\n\u8868 \u94dc\u548c\u94dd\u6750\u6599\u7684\u7269\u7406\u6027\u80fd<\/section>\n
<\/section>\n\u4e0a\u8868\u7ed9\u51fa\u4e86\u94dc\u548c\u94dd\u6750\u6599\u7269\u7406\u6027\u80fd\u6bd4\u8f83\u60c5\u51b5\uff1a<\/span><\/h1>\n\n- \n
\u94dc\u6750\u6599\u7535\u963b\u7387\u662f\u94dd\u768460%\uff0c\u6bd4\u94dd\u5177\u6709\u66f4\u597d\u7684\u5bfc\u7535\u4e0e\u5bfc\u70ed\u6027\u80fd\uff1b<\/span><\/h1>\n<\/li>\n- \n
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\u6bd4\u94dd\u6709\u66f4\u9ad8\u7684\u6297\u7535\u8fc1\u79fb\u6027\u80fd<\/span><\/h1>\n<\/li>\n<\/ul>\n\u91c7\u7528\u94dc\u6765\u66ff\u4ee3\u94dd\u4f5c\u4e3a\u82af\u7247\u91d1\u5c5e\u5316\u548c\u4e92\u8fde\u5f15\u7ebf\u7684\u6750\u6599\u6709\u5229\u4e8e\u964d\u4f4eIGBT \u529f\u7387\u635f\u8017\uff0c\u63d0\u5347\u82af\u7247\u6563\u70ed\u80fd\u529b\uff0c\u63d0\u9ad8\u6a21\u5757\u529f\u7387\u5bc6\u5ea6\u548c\u53ef\u9760\u6027\u3002<\/span><\/h1>\n
<\/p>\n\u56fe\u00a0\u94dd\u5f15\u7ebf\u952e\u5408\u70b9\u529f\u7387\u5faa\u73af\u540e\u5931\u6548<\/span><\/section>\n<\/h1>\n\u76ee\u524d\u5927\u529f\u7387\u6a21\u5757\u5c01\u88c5\u4e3b\u8981\u91c7\u7528\u94dd\u7ebf\u6216\u94dd\u5e26\u6750\u6599\uff0c\u901a\u8fc7\u8d85\u58f0\u952e\u5408\u5de5\u827a\u6765\u5b9e\u73b0\u82af\u7247\u4e4b\u95f4\u7684\u4e92\u8fde\u3002\u5728\u957f\u671f\u529f\u7387\u5faa\u73af\u8fc7\u7a0b\u4e2d\uff0c\u94dd\u5f15\u7ebf\u4e0e\u82af\u7247\u952e\u5408\u70b9\u6839\u90e8\u9644\u8fd1\u4f1a\u51fa\u73b0\u5f00\u88c2\u73b0\u8c61\u3002<\/span><\/span>\u94dd\u7684\u70ed\u81a8\u80c0\u7cfb\u6570\u6bd4\u94dc\u9ad850%\uff0c\u94dd\u7845\u4e4b\u95f4\u70ed\u81a8\u80c0\u7cfb\u6570\u5931\u914d\u66f4\u4e25\u91cd\uff0c\u91c7\u7528\u7845\u94dd\u5408\u91d1\uff081.2% Si-2%Al\uff09\u53ef\u4ee5\u5728\u4e00\u5b9a\u7a0b\u5ea6\u4e0a\u6539\u5584\u4e24\u79cd\u6750\u6599\u7684\u70ed\u81a8\u80c0\u7cfb\u6570\u5931\u914d\u800c\u5f15\u8d77\u7684\u6750\u6599\u6027\u80fd\u9000\u5316\uff0c\u540c\u65f6\u6539\u5584\u6297\u7535\u8fc1\u79fb\u80fd\u529b\u548c\u952e\u5408\u8d28\u91cf\uff0c\u4f46\u7845\u94dd\u5408\u91d1\u4f1a\u5f71\u54cd\u5bfc\u7535\u3001\u5bfc\u70ed\u6027\u80fd\uff1b\u901a\u8fc7\u63d0\u9ad8\u952e\u5408\u5f3a\u5ea6\uff0c\u53ef\u4ee5\u6539\u5584\u952e\u5408\u70b9\u7684\u7ed3\u5408\u8d28\u91cf\uff0c\u4f46\u5b58\u5728\u82af\u7247\u635f\u5bb3\u7684\u98ce\u9669\u3002<\/span><\/section>\n
<\/p>\n\u56fe\u00a0\u94dd\u7ebf\u548c\u94dc\u7ebf\u952e\u5408\u63a8\u529b\u6d4b\u8bd5<\/span><\/section>\n\u4f20\u7edf\u94dd\u4e92\u8fde\u5df2\u7ecf\u63a5\u8fd1\u5176\u5de5\u827a\u6781\u9650\uff0c\u94dc\u5177\u6709\u4f4e\u7535\u963b\u7387\u3001\u9ad8\u5bfc\u70ed\u7387\u3001\u4f4e\u70ed\u81a8\u80c0\u7cfb\u6570\u53ca\u9ad8\u8f7d\u6d41\u80fd\u529b\uff0c\u94dc\u7ebf\u7684\u6297\u7535\u8fc1\u79fb\u6027\u80fd\u589e\u52a0\u4e86\u7ea6\u4e24\u4e2a\u6570\u91cf\u7ea7\uff0c\u8fd9\u4e9b\u7269\u7406\u7279\u6027\u90fd\u6709\u5229\u4e8e\u63d0\u5347\u5668\u4ef6\u7684\u53ef\u9760\u6027\u3002\u91c7\u7528\u94dc\u5f15\u7ebf\u53d6\u4ee3\u4f20\u7edf\u7684\u94dd\u5f15\u7ebf\u5b9e\u73b0\u952e\u5408\u4e92\u8fde\uff0c\u76f8\u540c\u7ebf\u5f84\u7684\u94dc\u5f15\u7ebf\u8f7d\u6d41\u80fd\u529b\u53ef\u4ee5\u63d0\u9ad870%\uff0c\u662fIGBT \u6280\u672f\u53d1\u5c55\u65b9\u5411\uff0c\u5c24\u5176\u662f\u5728\u8f68\u9053\u4ea4\u901a\u3001\u7535\u529b\u7cfb\u7edf\u7b49\u9ad8\u7aef\u5e94\u7528\u9886\u57df\u3002<\/span><\/h1>\n<\/h2>\n2\u3001\u82af\u7247\u7684\u94dc\u91d1\u5c5e\u5316<\/strong><\/span><\/h2>\n\u8981\u5b9e\u73b0\u94dc\u5f15\u7ebf\u7684\u4e92\u8fde\uff0c\u9996\u5148\u5fc5\u987b\u786e\u4fdd\u82af\u7247\u8868\u9762\u7684\u91d1\u5c5e\u5316\u7535\u6781\u662f\u94dc\uff0c\u56e0\u6b64\u82af\u7247\u94dc\u91d1\u5c5e\u5316\u662f\u94dc\u5f15\u7ebf\u952e\u5408\u4e92\u8fde\u7684\u57fa\u7840\u3002\u7531\u4e8e\u94dc\u6bd4\u94dd\u7535\u963b\u7387\u66f4\u4f4e\u4e14\u5bfc\u70ed\u7cfb\u6570\u8f83\u9ad8\uff0c\u56e0\u800c\u82af\u7247\u8868\u9762\u7684\u539a\u94dc\u91d1\u5c5e\u5c42\u6709\u5229\u4e8e\u964d\u4f4e\u82af\u7247\u901a\u6001\u635f\u8017\u3001\u63d0\u9ad8\u82af\u7247\u8868\u9762\u70ed\u5bb9\u5e76\u6539\u5584\u6563\u70ed\u73af\u5883\uff0c<\/span>\u94dc\u5de5\u827aFRD \u82af\u7247\u7684\u8fd0\u884c\u97e7\u6027\u8f83\u94dd\u5de5\u827a\u82af\u7247\u6709\u5927\u5e45\u63d0\u5347\u3002<\/span><\/span><\/span><\/h1>\n<\/h1>\n\u94dc\u79bb\u5b50\u5728\u82af\u7247\u5185\u90e8\u662f\u4e00\u79cd\u6709\u5bb3\u6742\u8d28\u4ee5\u53ca\u5de5\u827a\u5e73\u53f0\u517c\u5bb9\u6027\u7b49\u95ee\u9898\uff0c\u963b\u788d\u4e86\u94dc\u5de5\u827a\u5728IGBT \u7b49\u529f\u7387\u5668\u4ef6\u5236\u9020\u4e2d\u7684\u5e94\u7528\u53d1\u5c55\u3002\u56e0\u6b64\uff0c\u4e3a\u4e86\u9632\u8303\u94dc\u91d1\u5c5e\u79bb\u5b50\u8fdb\u5165\u82af\u7247\u5185\u90e8\uff0c\u987b\u5728\u94dc\u91d1\u5c5e\u5c42\u4e0e\u7845\u82af\u7247\u4e4b\u95f4\u5f15\u5165\u4e00\u5c42\u963b\u6321\u5c42\u3002\u96be\u7194\u91d1\u5c5e\u53ca\u5176\u6c2e\u5316\u7269\u5982W\u3001Ti\/TiN\u3001Ta\/TaN \u7b49\uff0c\u7531\u4e8e\u5176\u826f\u597d\u7684\u5bfc\u7535\u6027\u3001\u70ed\u7a33\u5b9a\u6027\u7b49\u4f18\u70b9\u88ab\u89c6\u4e3a\u7406\u60f3\u7684\u963b\u6321\u5c42\u6750\u6599\u3002<\/span><\/span><\/span><\/section>\n
<\/p>\n\u56fe \u94dc\u91d1\u5c5e\u5316\u00a0IGBT\u00a0\u82af\u7247\u622a\u9762<\/span><\/section>\n\u91d1\u5c5e\u53ca\u5176\u6c2e\u5316\u7269\u7684\u590d\u5408\u7ed3\u6784\uff0c\u5982Ti\/TiN\u3001Ta\/TaN \u7b49\u7ed3\u6784\u66f4\u4e3a\u81f4\u5bc6\uff0c\u5bf9\u94dc\u79bb\u5b50\u7684\u963b\u6321\u6548\u679c\u66f4\u597d\uff0c\u5728\u963b\u6321\u5c42\u4e0a\u901a\u8fc7PVD \u6c89\u79ef\u4e00\u5c42\u8584Cu \u4f5c\u4e3a\u7535\u9540\u7684\u7c7d\u6676\u5c42\uff0c\u7136\u540e\u518d\u8fdb\u884c\u539a\u94dc\u7535\u9540\u3002\u4e3a\u4e86\u9632\u6b62\u94dc\u7684\u6c27\u5316\uff0c\u8868\u9762\u518d\u6c89\u79ef\u8584\u5c42\u6297\u6c27\u5316\u7684\u91d1\u5c5e\uff0c\u5982Ni\/Pd\/Au \u7b49\u3002<\/span><\/section>\n\u82af\u7247\u94dc\u91d1\u5c5e\u5316\u57fa\u4e8e\u4f20\u7edf\u94dd\u5de5\u827a\u6d41\u7a0b\uff0c\u4f46\u6bd4\u94dd\u91d1\u5c5e\u5316\u5de5\u827a\u8981\u590d\u6742\u5f88\u591a\uff0c\u4e0d\u4ec5\u9700\u8981\u6539\u53d8\u8868\u9762\u91d1\u5c5e\u6750\u6599\u4e0e\u7ed3\u6784\uff0c\u800c\u4e14\u6d41\u7a0b\u66f4\u957f\uff0c\u5176\u5de5\u827a\u6d41\u7a0b\u5982\u4e0b\u56fe\u6240\u793a\u3002<\/span><\/section>\n<\/section>\n
<\/p>\n\u56fe\u00a0IGBT\u00a0\u82af\u7247\u94dc\u91d1\u5c5e\u5316\u5de5\u827a\u6d41\u7a0b<\/span><\/section>\n\u7531\u4e8e\u591a\u5c42\u91d1\u5c5e\u7ed3\u6784\u6750\u6599\u4e4b\u95f4\u70ed\u81a8\u80c0\u7cfb\u6570\u5931\u914d\u4f1a\u4ea7\u751f\u5e94\u529b\u5dee\uff0c\u4ece\u800c\u589e\u52a0\u6676\u5706\u7fd8\u66f2\u5ea6\uff0c\u964d\u4f4e\u6676\u5706\u52a0\u5de5\u8fc7\u7a0b\u4e2d\u7684\u826f\u54c1\u7387\u3002\u56e0\u6b64\uff0c\u94dc\u7535\u9540\u53ca\u5176\u540e\u7eed\u9000\u706b\u5de5\u827a\u7684\u8fc7\u7a0b\u63a7\u5236\u5bf9\u51cf\u5c0f\u6676\u5706\u5185\u90e8\u5e94\u529b\u4e0d\u5e73\u8861\u800c\u5f15\u8d77\u7684\u6676\u5706\u7fd8\u66f2\u5ea6\u81f3\u5173\u91cd\u8981\u3002<\/span><\/section>\n<\/section>\n<\/section>\n3\u3001\u94dc\u7aef\u5b50\u8d85\u58f0\u710a\u63a5<\/strong><\/span><\/h2>\n\u7ecf\u8fc7IGBT \u82af\u7247\u7ea7\u3001\u886c\u677f\u7ea7\u5e76\u8054\u540e\uff0c\u901a\u8fc7\u94dc\u7aef\u5b50\u6c47\u6d41\u540e\u5f15\u51fa\u6765\uff0c\u4e0e\u5916\u90e8\u7535\u8def\u5f62\u6210\u7535\u6c14\u8fde\u63a5\uff0c\u56e0\u6b64\u5728\u5927\u529f\u7387\u6a21\u5757\u4e2d\uff0c\u6bcd\u7ebf\u7aef\u5b50\u710a\u63a5\u70b9\u662f\u7535\u6d41\u4e0e\u70ed\u91cf\u6700\u96c6\u4e2d\u7684\u5730\u65b9\uff0c\u4e5f\u662f\u5931\u6548\u7387\u6bd4\u8f83\u9ad8\u7684\u8584\u5f31\u73af\u8282\u4e4b\u4e00\u3002<\/span><\/section>\n<\/section>\n<\/section>\n\u4f20\u7edf\u529f\u7387\u7aef\u5b50\u4e92\u8fde\u91c7\u7528\u710a\u6599\u710a\u63a5\u5de5\u827a\uff0c\u5176\u4e0d\u8db3\u5728\u4e8e\u7535\/\u70ed\u63a5\u89e6\u963b\u6297\u8f83\u5927\uff0c\u6e29\u5ea6\u9ad8\u4e14\u5206\u5e03\u4e0d\u5747\u5300\u3002\u91c7\u7528\u8d85\u58f0\u710a\u63a5\u6280\u672f\uff0c\u6d88\u9664\u4e86\u4f20\u7edf\u710a\u6599\u710a\u63a5\u5b58\u5728\u7684\u56e0\u4e0d\u540c\u6750\u6599\u70ed\u81a8\u80c0\u7cfb\u6570\u5931\u914d\u3001\u957f\u671f\u70ed\u75b2\u52b3\u800c\u5f15\u8d77\u7684\u710a\u63a5\u754c\u9762\u9000\u5316\u3002<\/span><\/section>\n<\/section>\n\n\u56fe\u00a0\u8d85\u58f0\u710a\u63a5\u4e0e\u710a\u6599\u8fde\u63a5\u7684\u6a21\u5757\u5bc4\u751f\u7535\u963b\u5bf9\u6bd4<\/span><\/section>\n\u91c7\u7528\u8d85\u58f0\u710a\u63a5\u8fde\u63a5\u7684\u6bcd\u7ebf\u56e0\u6d88\u9664\u4e86\u710a\u6599\u5c42\u4ea7\u751f\u7684\u63a5\u89e6\u7535\u963b\u5f71\u54cd\uff0c\u6709\u5229\u4e8e\u964d\u4f4e\u5bc4\u751f\u7535\u963b\u5bfc\u901a\u635f\u8017\uff1b\u91c7\u7528<\/span>\u8d85\u58f0\u710a\u63a5\u7684<\/span>\u7aef\u5b50\u710a\u63a5\u5f3a\u5ea6\u7a33\u5b9a\u6027\uff0c\u5177\u6709\u826f\u597d\u7684\u673a\u68b0\u5f3a\u5ea6\u548c\u7535\/\u70ed\u63a5\u89e6\u72b6\u6001<\/span>\u3002<\/span><\/span><\/section>\n<\/section>\n
<\/section>\n\u56fe \u4e0d\u540c\u710a\u63a5\u5de5\u827a\u6bcd\u7ebf\u7aef\u5b50\u526a\u5207\u5f3a\u5ea6\u6bd4\u8f83<\/span><\/section>\n\u4e0e\u4f20\u7edf\u94dd\u5de5\u827a\u6280\u672f\u76f8\u6bd4\uff0c\u94dc\u5de5\u827aIGBT \u6a21\u5757\u5177\u6709\u66f4\u4f4e\u7684\u901a\u6001\u635f\u8017\u3001\u66f4\u9ad8\u6297\u6d6a\u6d8c\u7535\u6d41\u80fd\u529b\u548c\u66f4\u957f\u529f\u7387\u5faa\u73af\u5bff\u547d\uff0c\u66f4\u9002\u5408\u4e8e\u5de5\u51b5\u6076\u52a3\u7684\u7275\u5f15\u53d8\u6d41\u5668\u7b49\u5e94\u7528\u9886\u57df\u3002<\/span><\/section>\n\u6587\u7ae0\u6765\u6e90\uff1a\u5218\u56fd\u53cb, \u7f57\u6d77\u8f89, \u5f20\u9e3f\u946b, \u738b\u5f66\u521a, \u6f58\u662d\u6d77. \u57fa\u4e8e\u5168\u94dc\u5de5\u827a\u7684750A\/6500V\u9ad8\u6027\u80fdIGBT\u6a21\u5757[J]. \u7535\u5de5\u6280\u672f\u5b66\u62a5, 2020, 35(21): 4501-4510.<\/span><\/section>\n\n
\n
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<\/p>\n\u56fe\u00a0 \u5168\u94dc IGBT\u00a0\u6a21\u5757\u5c01\u88c5\u5de5\u827a\u6d41\u7a0b<\/span><\/section>\n\u94dc\u5de5\u827a\u6a21\u5757\u4e0e\u5c01\u88c5\u7ed3\u6784\u76f8\u540c\u7684\u94dd\u5de5\u827a\u6a21\u5757\u76f8\u6bd4\uff0c\u4e3b\u8981\u6709\u4e24\u65b9\u9762\u7684\u6539\u8fdb\u5185\u5bb9\uff1a<\/span><\/section>\n\u9996\u5148\u662f\u5728\u82af\u7247\u8868\u9762\u751f\u957f\u539a\u94dc\u5c42\uff0c\u4e0d\u4ec5\u6709\u5229\u4e8e\u964d\u4f4e\u82af\u7247\u901a\u6001\u635f\u8017\u3001\u6539\u5584\u6563\u70ed\uff0c\u540c\u65f6\u8fd8\u53ef\u4ee5\u7f13\u89e3\u94dc\u5f15\u7ebf\u952e\u5408\u8fc7\u7a0b\u4e2d\u7684\u51b2\u51fb\u529b\uff0c\u63d0\u9ad8\u952e\u5408\u70b9\u7684\u53ef\u9760\u6027\uff1b<\/span><\/section>\n\u5176\u6b21\uff0c\u82af\u7247\u4e4b\u95f4\u7684\u94dc\u5f15\u7ebf\u952e\u5408\u4e92\u8fde\uff0c\u53ef\u4ee5\u964d\u4f4e\u6a21\u5757\u5bc4\u751f\u7535\u963b\u635f\u8017\uff0c\u51cf\u5c0f\u952e\u5408\u5f15\u7ebf\u81ea\u70ed\u6548\u5e94\u7684\u5f71\u54cd\u3002<\/span><\/section>\nInfineon \u516c\u53f8\u63d0\u51fa\u4e86\u5305\u62ecIGBT\u82af\u7247\u94dc\u91d1\u5c5e\u5316\u3001\u94dc\u5f15\u7ebf\u952e\u5408\u7b49\u65b0\u6280\u672f\u7684.XT \u6280\u672f\uff0c\u5e76\u4e14\u901a\u8fc7\u5e94\u7528\u5728\u4e2d\u4f4e\u538b\u6a21\u5757\uff0c\u5bf9\u6bd4\u8bf4\u660e\u8be5\u6280\u672f\u53ef\u4ee5\u5728\u5f88\u5927\u7a0b\u5ea6\u4e0a\u63d0\u9ad8\u6a21\u5757\u7684\u4f7f\u7528\u6548\u7387\u53ca\u5bff\u547d\u3002<\/span><\/section>\n\u7814\u7a76\u8868\u660e\uff0c\u4e0e\u4f20\u7edf\u94dd\u5de5\u827a\u76f8\u6bd4\uff0c\u5168\u94dc\u5de5\u827a\u6a21\u5757\u4e0d\u4ec5\u4f7f\u5bfc\u901a\u635f\u8017\u964d\u4f4e\u4e8610%\u3001\u6d6a\u6d8c\u7535\u6d41\u80fd\u529b\u63d0\u5347\u4e8620%\uff0c\u800c\u4e14\u529f\u7387\u5faa\u73af\u80fd\u529b\u63d0\u9ad8\u4e8616 \u500d\uff0c\u63d0\u5347\u4e86\u529f\u7387\u6a21\u5757\u7684\u8fd0\u884c\u97e7\u6027\u4e0e\u5e94\u7528\u53ef\u9760\u6027\u3002<\/span><\/h1>\n\u4e8c\u3001\u5168\u94dc\u5de5\u827a\u6280\u672f\u4ecb\u7ecd<\/span><\/strong><\/span><\/h1>\n1\u3001\u94dc\u5f15\u7ebf\u5065\u5408<\/strong><\/span><\/h2>\n\u5927\u529f\u7387IGBT \u6a21\u5757\u5c01\u88c5\u7684\u53ef\u9760\u6027\u5728\u5f88\u5927\u7a0b\u5ea6\u4e0a\u53d6\u51b3\u4e8e\u82af\u7247\u4e4b\u95f4\u7684\u5f15\u7ebf\u4e92\u8fde\u5de5\u827a\u53ef\u9760\u6027\u6c34\u5e73\u3002\u56e0\u4e3a\u5f15\u7ebf\u6750\u6599\u53ca\u5176\u952e\u5408\u70b9\u7684\u53ef\u9760\u6027\u76f4\u63a5\u51b3\u5b9a\u4e86\u6a21\u5757\u5e94\u7528\u8fc7\u7a0b\u4e2d\u7684\u529f\u7387\u5faa\u73af\u80fd\u529b\u3002<\/span><\/span><\/h1>\n\u8868 \u94dc\u548c\u94dd\u6750\u6599\u7684\u7269\u7406\u6027\u80fd<\/section>\n
<\/section>\n\u4e0a\u8868\u7ed9\u51fa\u4e86\u94dc\u548c\u94dd\u6750\u6599\u7269\u7406\u6027\u80fd\u6bd4\u8f83\u60c5\u51b5\uff1a<\/span><\/h1>\n\n- \n
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<\/p>\n\u56fe\u00a0\u94dd\u5f15\u7ebf\u952e\u5408\u70b9\u529f\u7387\u5faa\u73af\u540e\u5931\u6548<\/span><\/section>\n<\/h1>\n\u76ee\u524d\u5927\u529f\u7387\u6a21\u5757\u5c01\u88c5\u4e3b\u8981\u91c7\u7528\u94dd\u7ebf\u6216\u94dd\u5e26\u6750\u6599\uff0c\u901a\u8fc7\u8d85\u58f0\u952e\u5408\u5de5\u827a\u6765\u5b9e\u73b0\u82af\u7247\u4e4b\u95f4\u7684\u4e92\u8fde\u3002\u5728\u957f\u671f\u529f\u7387\u5faa\u73af\u8fc7\u7a0b\u4e2d\uff0c\u94dd\u5f15\u7ebf\u4e0e\u82af\u7247\u952e\u5408\u70b9\u6839\u90e8\u9644\u8fd1\u4f1a\u51fa\u73b0\u5f00\u88c2\u73b0\u8c61\u3002<\/span><\/span>\u94dd\u7684\u70ed\u81a8\u80c0\u7cfb\u6570\u6bd4\u94dc\u9ad850%\uff0c\u94dd\u7845\u4e4b\u95f4\u70ed\u81a8\u80c0\u7cfb\u6570\u5931\u914d\u66f4\u4e25\u91cd\uff0c\u91c7\u7528\u7845\u94dd\u5408\u91d1\uff081.2% Si-2%Al\uff09\u53ef\u4ee5\u5728\u4e00\u5b9a\u7a0b\u5ea6\u4e0a\u6539\u5584\u4e24\u79cd\u6750\u6599\u7684\u70ed\u81a8\u80c0\u7cfb\u6570\u5931\u914d\u800c\u5f15\u8d77\u7684\u6750\u6599\u6027\u80fd\u9000\u5316\uff0c\u540c\u65f6\u6539\u5584\u6297\u7535\u8fc1\u79fb\u80fd\u529b\u548c\u952e\u5408\u8d28\u91cf\uff0c\u4f46\u7845\u94dd\u5408\u91d1\u4f1a\u5f71\u54cd\u5bfc\u7535\u3001\u5bfc\u70ed\u6027\u80fd\uff1b\u901a\u8fc7\u63d0\u9ad8\u952e\u5408\u5f3a\u5ea6\uff0c\u53ef\u4ee5\u6539\u5584\u952e\u5408\u70b9\u7684\u7ed3\u5408\u8d28\u91cf\uff0c\u4f46\u5b58\u5728\u82af\u7247\u635f\u5bb3\u7684\u98ce\u9669\u3002<\/span><\/section>\n
<\/p>\n\u56fe\u00a0\u94dd\u7ebf\u548c\u94dc\u7ebf\u952e\u5408\u63a8\u529b\u6d4b\u8bd5<\/span><\/section>\n\u4f20\u7edf\u94dd\u4e92\u8fde\u5df2\u7ecf\u63a5\u8fd1\u5176\u5de5\u827a\u6781\u9650\uff0c\u94dc\u5177\u6709\u4f4e\u7535\u963b\u7387\u3001\u9ad8\u5bfc\u70ed\u7387\u3001\u4f4e\u70ed\u81a8\u80c0\u7cfb\u6570\u53ca\u9ad8\u8f7d\u6d41\u80fd\u529b\uff0c\u94dc\u7ebf\u7684\u6297\u7535\u8fc1\u79fb\u6027\u80fd\u589e\u52a0\u4e86\u7ea6\u4e24\u4e2a\u6570\u91cf\u7ea7\uff0c\u8fd9\u4e9b\u7269\u7406\u7279\u6027\u90fd\u6709\u5229\u4e8e\u63d0\u5347\u5668\u4ef6\u7684\u53ef\u9760\u6027\u3002\u91c7\u7528\u94dc\u5f15\u7ebf\u53d6\u4ee3\u4f20\u7edf\u7684\u94dd\u5f15\u7ebf\u5b9e\u73b0\u952e\u5408\u4e92\u8fde\uff0c\u76f8\u540c\u7ebf\u5f84\u7684\u94dc\u5f15\u7ebf\u8f7d\u6d41\u80fd\u529b\u53ef\u4ee5\u63d0\u9ad870%\uff0c\u662fIGBT \u6280\u672f\u53d1\u5c55\u65b9\u5411\uff0c\u5c24\u5176\u662f\u5728\u8f68\u9053\u4ea4\u901a\u3001\u7535\u529b\u7cfb\u7edf\u7b49\u9ad8\u7aef\u5e94\u7528\u9886\u57df\u3002<\/span><\/h1>\n<\/h2>\n2\u3001\u82af\u7247\u7684\u94dc\u91d1\u5c5e\u5316<\/strong><\/span><\/h2>\n\u8981\u5b9e\u73b0\u94dc\u5f15\u7ebf\u7684\u4e92\u8fde\uff0c\u9996\u5148\u5fc5\u987b\u786e\u4fdd\u82af\u7247\u8868\u9762\u7684\u91d1\u5c5e\u5316\u7535\u6781\u662f\u94dc\uff0c\u56e0\u6b64\u82af\u7247\u94dc\u91d1\u5c5e\u5316\u662f\u94dc\u5f15\u7ebf\u952e\u5408\u4e92\u8fde\u7684\u57fa\u7840\u3002\u7531\u4e8e\u94dc\u6bd4\u94dd\u7535\u963b\u7387\u66f4\u4f4e\u4e14\u5bfc\u70ed\u7cfb\u6570\u8f83\u9ad8\uff0c\u56e0\u800c\u82af\u7247\u8868\u9762\u7684\u539a\u94dc\u91d1\u5c5e\u5c42\u6709\u5229\u4e8e\u964d\u4f4e\u82af\u7247\u901a\u6001\u635f\u8017\u3001\u63d0\u9ad8\u82af\u7247\u8868\u9762\u70ed\u5bb9\u5e76\u6539\u5584\u6563\u70ed\u73af\u5883\uff0c<\/span>\u94dc\u5de5\u827aFRD \u82af\u7247\u7684\u8fd0\u884c\u97e7\u6027\u8f83\u94dd\u5de5\u827a\u82af\u7247\u6709\u5927\u5e45\u63d0\u5347\u3002<\/span><\/span><\/span><\/h1>\n<\/h1>\n\u94dc\u79bb\u5b50\u5728\u82af\u7247\u5185\u90e8\u662f\u4e00\u79cd\u6709\u5bb3\u6742\u8d28\u4ee5\u53ca\u5de5\u827a\u5e73\u53f0\u517c\u5bb9\u6027\u7b49\u95ee\u9898\uff0c\u963b\u788d\u4e86\u94dc\u5de5\u827a\u5728IGBT \u7b49\u529f\u7387\u5668\u4ef6\u5236\u9020\u4e2d\u7684\u5e94\u7528\u53d1\u5c55\u3002\u56e0\u6b64\uff0c\u4e3a\u4e86\u9632\u8303\u94dc\u91d1\u5c5e\u79bb\u5b50\u8fdb\u5165\u82af\u7247\u5185\u90e8\uff0c\u987b\u5728\u94dc\u91d1\u5c5e\u5c42\u4e0e\u7845\u82af\u7247\u4e4b\u95f4\u5f15\u5165\u4e00\u5c42\u963b\u6321\u5c42\u3002\u96be\u7194\u91d1\u5c5e\u53ca\u5176\u6c2e\u5316\u7269\u5982W\u3001Ti\/TiN\u3001Ta\/TaN \u7b49\uff0c\u7531\u4e8e\u5176\u826f\u597d\u7684\u5bfc\u7535\u6027\u3001\u70ed\u7a33\u5b9a\u6027\u7b49\u4f18\u70b9\u88ab\u89c6\u4e3a\u7406\u60f3\u7684\u963b\u6321\u5c42\u6750\u6599\u3002<\/span><\/span><\/span><\/section>\n
<\/p>\n\u56fe \u94dc\u91d1\u5c5e\u5316\u00a0IGBT\u00a0\u82af\u7247\u622a\u9762<\/span><\/section>\n\u91d1\u5c5e\u53ca\u5176\u6c2e\u5316\u7269\u7684\u590d\u5408\u7ed3\u6784\uff0c\u5982Ti\/TiN\u3001Ta\/TaN \u7b49\u7ed3\u6784\u66f4\u4e3a\u81f4\u5bc6\uff0c\u5bf9\u94dc\u79bb\u5b50\u7684\u963b\u6321\u6548\u679c\u66f4\u597d\uff0c\u5728\u963b\u6321\u5c42\u4e0a\u901a\u8fc7PVD \u6c89\u79ef\u4e00\u5c42\u8584Cu \u4f5c\u4e3a\u7535\u9540\u7684\u7c7d\u6676\u5c42\uff0c\u7136\u540e\u518d\u8fdb\u884c\u539a\u94dc\u7535\u9540\u3002\u4e3a\u4e86\u9632\u6b62\u94dc\u7684\u6c27\u5316\uff0c\u8868\u9762\u518d\u6c89\u79ef\u8584\u5c42\u6297\u6c27\u5316\u7684\u91d1\u5c5e\uff0c\u5982Ni\/Pd\/Au \u7b49\u3002<\/span><\/section>\n\u82af\u7247\u94dc\u91d1\u5c5e\u5316\u57fa\u4e8e\u4f20\u7edf\u94dd\u5de5\u827a\u6d41\u7a0b\uff0c\u4f46\u6bd4\u94dd\u91d1\u5c5e\u5316\u5de5\u827a\u8981\u590d\u6742\u5f88\u591a\uff0c\u4e0d\u4ec5\u9700\u8981\u6539\u53d8\u8868\u9762\u91d1\u5c5e\u6750\u6599\u4e0e\u7ed3\u6784\uff0c\u800c\u4e14\u6d41\u7a0b\u66f4\u957f\uff0c\u5176\u5de5\u827a\u6d41\u7a0b\u5982\u4e0b\u56fe\u6240\u793a\u3002<\/span><\/section>\n<\/section>\n
<\/p>\n\u56fe\u00a0IGBT\u00a0\u82af\u7247\u94dc\u91d1\u5c5e\u5316\u5de5\u827a\u6d41\u7a0b<\/span><\/section>\n\u7531\u4e8e\u591a\u5c42\u91d1\u5c5e\u7ed3\u6784\u6750\u6599\u4e4b\u95f4\u70ed\u81a8\u80c0\u7cfb\u6570\u5931\u914d\u4f1a\u4ea7\u751f\u5e94\u529b\u5dee\uff0c\u4ece\u800c\u589e\u52a0\u6676\u5706\u7fd8\u66f2\u5ea6\uff0c\u964d\u4f4e\u6676\u5706\u52a0\u5de5\u8fc7\u7a0b\u4e2d\u7684\u826f\u54c1\u7387\u3002\u56e0\u6b64\uff0c\u94dc\u7535\u9540\u53ca\u5176\u540e\u7eed\u9000\u706b\u5de5\u827a\u7684\u8fc7\u7a0b\u63a7\u5236\u5bf9\u51cf\u5c0f\u6676\u5706\u5185\u90e8\u5e94\u529b\u4e0d\u5e73\u8861\u800c\u5f15\u8d77\u7684\u6676\u5706\u7fd8\u66f2\u5ea6\u81f3\u5173\u91cd\u8981\u3002<\/span><\/section>\n<\/section>\n<\/section>\n3\u3001\u94dc\u7aef\u5b50\u8d85\u58f0\u710a\u63a5<\/strong><\/span><\/h2>\n\u7ecf\u8fc7IGBT \u82af\u7247\u7ea7\u3001\u886c\u677f\u7ea7\u5e76\u8054\u540e\uff0c\u901a\u8fc7\u94dc\u7aef\u5b50\u6c47\u6d41\u540e\u5f15\u51fa\u6765\uff0c\u4e0e\u5916\u90e8\u7535\u8def\u5f62\u6210\u7535\u6c14\u8fde\u63a5\uff0c\u56e0\u6b64\u5728\u5927\u529f\u7387\u6a21\u5757\u4e2d\uff0c\u6bcd\u7ebf\u7aef\u5b50\u710a\u63a5\u70b9\u662f\u7535\u6d41\u4e0e\u70ed\u91cf\u6700\u96c6\u4e2d\u7684\u5730\u65b9\uff0c\u4e5f\u662f\u5931\u6548\u7387\u6bd4\u8f83\u9ad8\u7684\u8584\u5f31\u73af\u8282\u4e4b\u4e00\u3002<\/span><\/section>\n<\/section>\n<\/section>\n\u4f20\u7edf\u529f\u7387\u7aef\u5b50\u4e92\u8fde\u91c7\u7528\u710a\u6599\u710a\u63a5\u5de5\u827a\uff0c\u5176\u4e0d\u8db3\u5728\u4e8e\u7535\/\u70ed\u63a5\u89e6\u963b\u6297\u8f83\u5927\uff0c\u6e29\u5ea6\u9ad8\u4e14\u5206\u5e03\u4e0d\u5747\u5300\u3002\u91c7\u7528\u8d85\u58f0\u710a\u63a5\u6280\u672f\uff0c\u6d88\u9664\u4e86\u4f20\u7edf\u710a\u6599\u710a\u63a5\u5b58\u5728\u7684\u56e0\u4e0d\u540c\u6750\u6599\u70ed\u81a8\u80c0\u7cfb\u6570\u5931\u914d\u3001\u957f\u671f\u70ed\u75b2\u52b3\u800c\u5f15\u8d77\u7684\u710a\u63a5\u754c\u9762\u9000\u5316\u3002<\/span><\/section>\n<\/section>\n\n\u56fe\u00a0\u8d85\u58f0\u710a\u63a5\u4e0e\u710a\u6599\u8fde\u63a5\u7684\u6a21\u5757\u5bc4\u751f\u7535\u963b\u5bf9\u6bd4<\/span><\/section>\n\u91c7\u7528\u8d85\u58f0\u710a\u63a5\u8fde\u63a5\u7684\u6bcd\u7ebf\u56e0\u6d88\u9664\u4e86\u710a\u6599\u5c42\u4ea7\u751f\u7684\u63a5\u89e6\u7535\u963b\u5f71\u54cd\uff0c\u6709\u5229\u4e8e\u964d\u4f4e\u5bc4\u751f\u7535\u963b\u5bfc\u901a\u635f\u8017\uff1b\u91c7\u7528<\/span>\u8d85\u58f0\u710a\u63a5\u7684<\/span>\u7aef\u5b50\u710a\u63a5\u5f3a\u5ea6\u7a33\u5b9a\u6027\uff0c\u5177\u6709\u826f\u597d\u7684\u673a\u68b0\u5f3a\u5ea6\u548c\u7535\/\u70ed\u63a5\u89e6\u72b6\u6001<\/span>\u3002<\/span><\/span><\/section>\n<\/section>\n
<\/section>\n\u56fe \u4e0d\u540c\u710a\u63a5\u5de5\u827a\u6bcd\u7ebf\u7aef\u5b50\u526a\u5207\u5f3a\u5ea6\u6bd4\u8f83<\/span><\/section>\n\u4e0e\u4f20\u7edf\u94dd\u5de5\u827a\u6280\u672f\u76f8\u6bd4\uff0c\u94dc\u5de5\u827aIGBT \u6a21\u5757\u5177\u6709\u66f4\u4f4e\u7684\u901a\u6001\u635f\u8017\u3001\u66f4\u9ad8\u6297\u6d6a\u6d8c\u7535\u6d41\u80fd\u529b\u548c\u66f4\u957f\u529f\u7387\u5faa\u73af\u5bff\u547d\uff0c\u66f4\u9002\u5408\u4e8e\u5de5\u51b5\u6076\u52a3\u7684\u7275\u5f15\u53d8\u6d41\u5668\u7b49\u5e94\u7528\u9886\u57df\u3002<\/span><\/section>\n\u6587\u7ae0\u6765\u6e90\uff1a\u5218\u56fd\u53cb, \u7f57\u6d77\u8f89, \u5f20\u9e3f\u946b, \u738b\u5f66\u521a, \u6f58\u662d\u6d77. \u57fa\u4e8e\u5168\u94dc\u5de5\u827a\u7684750A\/6500V\u9ad8\u6027\u80fdIGBT\u6a21\u5757[J]. \u7535\u5de5\u6280\u672f\u5b66\u62a5, 2020, 35(21): 4501-4510.<\/span><\/section>\n\n
\n


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<\/section>\n\u4e0a\u8868\u7ed9\u51fa\u4e86\u94dc\u548c\u94dd\u6750\u6599\u7269\u7406\u6027\u80fd\u6bd4\u8f83\u60c5\u51b5\uff1a<\/span><\/h1>\n\n- \n
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<\/section>\n\u56fe \u4e0d\u540c\u710a\u63a5\u5de5\u827a\u6bcd\u7ebf\u7aef\u5b50\u526a\u5207\u5f3a\u5ea6\u6bd4\u8f83<\/span><\/section>\n\u4e0e\u4f20\u7edf\u94dd\u5de5\u827a\u6280\u672f\u76f8\u6bd4\uff0c\u94dc\u5de5\u827aIGBT \u6a21\u5757\u5177\u6709\u66f4\u4f4e\u7684\u901a\u6001\u635f\u8017\u3001\u66f4\u9ad8\u6297\u6d6a\u6d8c\u7535\u6d41\u80fd\u529b\u548c\u66f4\u957f\u529f\u7387\u5faa\u73af\u5bff\u547d\uff0c\u66f4\u9002\u5408\u4e8e\u5de5\u51b5\u6076\u52a3\u7684\u7275\u5f15\u53d8\u6d41\u5668\u7b49\u5e94\u7528\u9886\u57df\u3002<\/span><\/section>\n\u6587\u7ae0\u6765\u6e90\uff1a\u5218\u56fd\u53cb, \u7f57\u6d77\u8f89, \u5f20\u9e3f\u946b, \u738b\u5f66\u521a, \u6f58\u662d\u6d77. \u57fa\u4e8e\u5168\u94dc\u5de5\u827a\u7684750A\/6500V\u9ad8\u6027\u80fdIGBT\u6a21\u5757[J]. \u7535\u5de5\u6280\u672f\u5b66\u62a5, 2020, 35(21): 4501-4510.<\/span><\/section>\n\n
\n
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<\/p>\n\u56fe\u00a0\u94dd\u5f15\u7ebf\u952e\u5408\u70b9\u529f\u7387\u5faa\u73af\u540e\u5931\u6548<\/span><\/section>\n<\/h1>\n\u76ee\u524d\u5927\u529f\u7387\u6a21\u5757\u5c01\u88c5\u4e3b\u8981\u91c7\u7528\u94dd\u7ebf\u6216\u94dd\u5e26\u6750\u6599\uff0c\u901a\u8fc7\u8d85\u58f0\u952e\u5408\u5de5\u827a\u6765\u5b9e\u73b0\u82af\u7247\u4e4b\u95f4\u7684\u4e92\u8fde\u3002\u5728\u957f\u671f\u529f\u7387\u5faa\u73af\u8fc7\u7a0b\u4e2d\uff0c\u94dd\u5f15\u7ebf\u4e0e\u82af\u7247\u952e\u5408\u70b9\u6839\u90e8\u9644\u8fd1\u4f1a\u51fa\u73b0\u5f00\u88c2\u73b0\u8c61\u3002<\/span><\/span>\u94dd\u7684\u70ed\u81a8\u80c0\u7cfb\u6570\u6bd4\u94dc\u9ad850%\uff0c\u94dd\u7845\u4e4b\u95f4\u70ed\u81a8\u80c0\u7cfb\u6570\u5931\u914d\u66f4\u4e25\u91cd\uff0c\u91c7\u7528\u7845\u94dd\u5408\u91d1\uff081.2% Si-2%Al\uff09\u53ef\u4ee5\u5728\u4e00\u5b9a\u7a0b\u5ea6\u4e0a\u6539\u5584\u4e24\u79cd\u6750\u6599\u7684\u70ed\u81a8\u80c0\u7cfb\u6570\u5931\u914d\u800c\u5f15\u8d77\u7684\u6750\u6599\u6027\u80fd\u9000\u5316\uff0c\u540c\u65f6\u6539\u5584\u6297\u7535\u8fc1\u79fb\u80fd\u529b\u548c\u952e\u5408\u8d28\u91cf\uff0c\u4f46\u7845\u94dd\u5408\u91d1\u4f1a\u5f71\u54cd\u5bfc\u7535\u3001\u5bfc\u70ed\u6027\u80fd\uff1b\u901a\u8fc7\u63d0\u9ad8\u952e\u5408\u5f3a\u5ea6\uff0c\u53ef\u4ee5\u6539\u5584\u952e\u5408\u70b9\u7684\u7ed3\u5408\u8d28\u91cf\uff0c\u4f46\u5b58\u5728\u82af\u7247\u635f\u5bb3\u7684\u98ce\u9669\u3002<\/span><\/section>\n
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<\/section>\n\u56fe \u4e0d\u540c\u710a\u63a5\u5de5\u827a\u6bcd\u7ebf\u7aef\u5b50\u526a\u5207\u5f3a\u5ea6\u6bd4\u8f83<\/span><\/section>\n\u4e0e\u4f20\u7edf\u94dd\u5de5\u827a\u6280\u672f\u76f8\u6bd4\uff0c\u94dc\u5de5\u827aIGBT \u6a21\u5757\u5177\u6709\u66f4\u4f4e\u7684\u901a\u6001\u635f\u8017\u3001\u66f4\u9ad8\u6297\u6d6a\u6d8c\u7535\u6d41\u80fd\u529b\u548c\u66f4\u957f\u529f\u7387\u5faa\u73af\u5bff\u547d\uff0c\u66f4\u9002\u5408\u4e8e\u5de5\u51b5\u6076\u52a3\u7684\u7275\u5f15\u53d8\u6d41\u5668\u7b49\u5e94\u7528\u9886\u57df\u3002<\/span><\/section>\n\u6587\u7ae0\u6765\u6e90\uff1a\u5218\u56fd\u53cb, \u7f57\u6d77\u8f89, \u5f20\u9e3f\u946b, \u738b\u5f66\u521a, \u6f58\u662d\u6d77. \u57fa\u4e8e\u5168\u94dc\u5de5\u827a\u7684750A\/6500V\u9ad8\u6027\u80fdIGBT\u6a21\u5757[J]. \u7535\u5de5\u6280\u672f\u5b66\u62a5, 2020, 35(21): 4501-4510.<\/span><\/section>\n\n
\n

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<\/p>\n\u56fe\u00a0\u94dd\u5f15\u7ebf\u952e\u5408\u70b9\u529f\u7387\u5faa\u73af\u540e\u5931\u6548<\/span><\/section>\n<\/h1>\n\u76ee\u524d\u5927\u529f\u7387\u6a21\u5757\u5c01\u88c5\u4e3b\u8981\u91c7\u7528\u94dd\u7ebf\u6216\u94dd\u5e26\u6750\u6599\uff0c\u901a\u8fc7\u8d85\u58f0\u952e\u5408\u5de5\u827a\u6765\u5b9e\u73b0\u82af\u7247\u4e4b\u95f4\u7684\u4e92\u8fde\u3002\u5728\u957f\u671f\u529f\u7387\u5faa\u73af\u8fc7\u7a0b\u4e2d\uff0c\u94dd\u5f15\u7ebf\u4e0e\u82af\u7247\u952e\u5408\u70b9\u6839\u90e8\u9644\u8fd1\u4f1a\u51fa\u73b0\u5f00\u88c2\u73b0\u8c61\u3002<\/span><\/span>\u94dd\u7684\u70ed\u81a8\u80c0\u7cfb\u6570\u6bd4\u94dc\u9ad850%\uff0c\u94dd\u7845\u4e4b\u95f4\u70ed\u81a8\u80c0\u7cfb\u6570\u5931\u914d\u66f4\u4e25\u91cd\uff0c\u91c7\u7528\u7845\u94dd\u5408\u91d1\uff081.2% Si-2%Al\uff09\u53ef\u4ee5\u5728\u4e00\u5b9a\u7a0b\u5ea6\u4e0a\u6539\u5584\u4e24\u79cd\u6750\u6599\u7684\u70ed\u81a8\u80c0\u7cfb\u6570\u5931\u914d\u800c\u5f15\u8d77\u7684\u6750\u6599\u6027\u80fd\u9000\u5316\uff0c\u540c\u65f6\u6539\u5584\u6297\u7535\u8fc1\u79fb\u80fd\u529b\u548c\u952e\u5408\u8d28\u91cf\uff0c\u4f46\u7845\u94dd\u5408\u91d1\u4f1a\u5f71\u54cd\u5bfc\u7535\u3001\u5bfc\u70ed\u6027\u80fd\uff1b\u901a\u8fc7\u63d0\u9ad8\u952e\u5408\u5f3a\u5ea6\uff0c\u53ef\u4ee5\u6539\u5584\u952e\u5408\u70b9\u7684\u7ed3\u5408\u8d28\u91cf\uff0c\u4f46\u5b58\u5728\u82af\u7247\u635f\u5bb3\u7684\u98ce\u9669\u3002<\/span><\/section>\n
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<\/section>\n\u56fe \u4e0d\u540c\u710a\u63a5\u5de5\u827a\u6bcd\u7ebf\u7aef\u5b50\u526a\u5207\u5f3a\u5ea6\u6bd4\u8f83<\/span><\/section>\n\u4e0e\u4f20\u7edf\u94dd\u5de5\u827a\u6280\u672f\u76f8\u6bd4\uff0c\u94dc\u5de5\u827aIGBT \u6a21\u5757\u5177\u6709\u66f4\u4f4e\u7684\u901a\u6001\u635f\u8017\u3001\u66f4\u9ad8\u6297\u6d6a\u6d8c\u7535\u6d41\u80fd\u529b\u548c\u66f4\u957f\u529f\u7387\u5faa\u73af\u5bff\u547d\uff0c\u66f4\u9002\u5408\u4e8e\u5de5\u51b5\u6076\u52a3\u7684\u7275\u5f15\u53d8\u6d41\u5668\u7b49\u5e94\u7528\u9886\u57df\u3002<\/span><\/section>\n\u6587\u7ae0\u6765\u6e90\uff1a\u5218\u56fd\u53cb, \u7f57\u6d77\u8f89, \u5f20\u9e3f\u946b, \u738b\u5f66\u521a, \u6f58\u662d\u6d77. \u57fa\u4e8e\u5168\u94dc\u5de5\u827a\u7684750A\/6500V\u9ad8\u6027\u80fdIGBT\u6a21\u5757[J]. \u7535\u5de5\u6280\u672f\u5b66\u62a5, 2020, 35(21): 4501-4510.<\/span><\/section>\n\n
\n
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<\/p>\n\u56fe\u00a0\u94dd\u5f15\u7ebf\u952e\u5408\u70b9\u529f\u7387\u5faa\u73af\u540e\u5931\u6548<\/span><\/section>\n<\/h1>\n\u76ee\u524d\u5927\u529f\u7387\u6a21\u5757\u5c01\u88c5\u4e3b\u8981\u91c7\u7528\u94dd\u7ebf\u6216\u94dd\u5e26\u6750\u6599\uff0c\u901a\u8fc7\u8d85\u58f0\u952e\u5408\u5de5\u827a\u6765\u5b9e\u73b0\u82af\u7247\u4e4b\u95f4\u7684\u4e92\u8fde\u3002\u5728\u957f\u671f\u529f\u7387\u5faa\u73af\u8fc7\u7a0b\u4e2d\uff0c\u94dd\u5f15\u7ebf\u4e0e\u82af\u7247\u952e\u5408\u70b9\u6839\u90e8\u9644\u8fd1\u4f1a\u51fa\u73b0\u5f00\u88c2\u73b0\u8c61\u3002<\/span><\/span>\u94dd\u7684\u70ed\u81a8\u80c0\u7cfb\u6570\u6bd4\u94dc\u9ad850%\uff0c\u94dd\u7845\u4e4b\u95f4\u70ed\u81a8\u80c0\u7cfb\u6570\u5931\u914d\u66f4\u4e25\u91cd\uff0c\u91c7\u7528\u7845\u94dd\u5408\u91d1\uff081.2% Si-2%Al\uff09\u53ef\u4ee5\u5728\u4e00\u5b9a\u7a0b\u5ea6\u4e0a\u6539\u5584\u4e24\u79cd\u6750\u6599\u7684\u70ed\u81a8\u80c0\u7cfb\u6570\u5931\u914d\u800c\u5f15\u8d77\u7684\u6750\u6599\u6027\u80fd\u9000\u5316\uff0c\u540c\u65f6\u6539\u5584\u6297\u7535\u8fc1\u79fb\u80fd\u529b\u548c\u952e\u5408\u8d28\u91cf\uff0c\u4f46\u7845\u94dd\u5408\u91d1\u4f1a\u5f71\u54cd\u5bfc\u7535\u3001\u5bfc\u70ed\u6027\u80fd\uff1b\u901a\u8fc7\u63d0\u9ad8\u952e\u5408\u5f3a\u5ea6\uff0c\u53ef\u4ee5\u6539\u5584\u952e\u5408\u70b9\u7684\u7ed3\u5408\u8d28\u91cf\uff0c\u4f46\u5b58\u5728\u82af\u7247\u635f\u5bb3\u7684\u98ce\u9669\u3002<\/span><\/section>\n
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<\/section>\n\u56fe \u4e0d\u540c\u710a\u63a5\u5de5\u827a\u6bcd\u7ebf\u7aef\u5b50\u526a\u5207\u5f3a\u5ea6\u6bd4\u8f83<\/span><\/section>\n\u4e0e\u4f20\u7edf\u94dd\u5de5\u827a\u6280\u672f\u76f8\u6bd4\uff0c\u94dc\u5de5\u827aIGBT \u6a21\u5757\u5177\u6709\u66f4\u4f4e\u7684\u901a\u6001\u635f\u8017\u3001\u66f4\u9ad8\u6297\u6d6a\u6d8c\u7535\u6d41\u80fd\u529b\u548c\u66f4\u957f\u529f\u7387\u5faa\u73af\u5bff\u547d\uff0c\u66f4\u9002\u5408\u4e8e\u5de5\u51b5\u6076\u52a3\u7684\u7275\u5f15\u53d8\u6d41\u5668\u7b49\u5e94\u7528\u9886\u57df\u3002<\/span><\/section>\n\u6587\u7ae0\u6765\u6e90\uff1a\u5218\u56fd\u53cb, \u7f57\u6d77\u8f89, \u5f20\u9e3f\u946b, \u738b\u5f66\u521a, \u6f58\u662d\u6d77. \u57fa\u4e8e\u5168\u94dc\u5de5\u827a\u7684750A\/6500V\u9ad8\u6027\u80fdIGBT\u6a21\u5757[J]. \u7535\u5de5\u6280\u672f\u5b66\u62a5, 2020, 35(21): 4501-4510.<\/span><\/section>\n\n
\n
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<\/p>\n\u56fe\u00a0\u94dd\u5f15\u7ebf\u952e\u5408\u70b9\u529f\u7387\u5faa\u73af\u540e\u5931\u6548<\/span><\/section>\n<\/h1>\n\u76ee\u524d\u5927\u529f\u7387\u6a21\u5757\u5c01\u88c5\u4e3b\u8981\u91c7\u7528\u94dd\u7ebf\u6216\u94dd\u5e26\u6750\u6599\uff0c\u901a\u8fc7\u8d85\u58f0\u952e\u5408\u5de5\u827a\u6765\u5b9e\u73b0\u82af\u7247\u4e4b\u95f4\u7684\u4e92\u8fde\u3002\u5728\u957f\u671f\u529f\u7387\u5faa\u73af\u8fc7\u7a0b\u4e2d\uff0c\u94dd\u5f15\u7ebf\u4e0e\u82af\u7247\u952e\u5408\u70b9\u6839\u90e8\u9644\u8fd1\u4f1a\u51fa\u73b0\u5f00\u88c2\u73b0\u8c61\u3002<\/span><\/span>\u94dd\u7684\u70ed\u81a8\u80c0\u7cfb\u6570\u6bd4\u94dc\u9ad850%\uff0c\u94dd\u7845\u4e4b\u95f4\u70ed\u81a8\u80c0\u7cfb\u6570\u5931\u914d\u66f4\u4e25\u91cd\uff0c\u91c7\u7528\u7845\u94dd\u5408\u91d1\uff081.2% Si-2%Al\uff09\u53ef\u4ee5\u5728\u4e00\u5b9a\u7a0b\u5ea6\u4e0a\u6539\u5584\u4e24\u79cd\u6750\u6599\u7684\u70ed\u81a8\u80c0\u7cfb\u6570\u5931\u914d\u800c\u5f15\u8d77\u7684\u6750\u6599\u6027\u80fd\u9000\u5316\uff0c\u540c\u65f6\u6539\u5584\u6297\u7535\u8fc1\u79fb\u80fd\u529b\u548c\u952e\u5408\u8d28\u91cf\uff0c\u4f46\u7845\u94dd\u5408\u91d1\u4f1a\u5f71\u54cd\u5bfc\u7535\u3001\u5bfc\u70ed\u6027\u80fd\uff1b\u901a\u8fc7\u63d0\u9ad8\u952e\u5408\u5f3a\u5ea6\uff0c\u53ef\u4ee5\u6539\u5584\u952e\u5408\u70b9\u7684\u7ed3\u5408\u8d28\u91cf\uff0c\u4f46\u5b58\u5728\u82af\u7247\u635f\u5bb3\u7684\u98ce\u9669\u3002<\/span><\/section>\n
<\/p>\n\u56fe\u00a0\u94dd\u7ebf\u548c\u94dc\u7ebf\u952e\u5408\u63a8\u529b\u6d4b\u8bd5<\/span><\/section>\n\u4f20\u7edf\u94dd\u4e92\u8fde\u5df2\u7ecf\u63a5\u8fd1\u5176\u5de5\u827a\u6781\u9650\uff0c\u94dc\u5177\u6709\u4f4e\u7535\u963b\u7387\u3001\u9ad8\u5bfc\u70ed\u7387\u3001\u4f4e\u70ed\u81a8\u80c0\u7cfb\u6570\u53ca\u9ad8\u8f7d\u6d41\u80fd\u529b\uff0c\u94dc\u7ebf\u7684\u6297\u7535\u8fc1\u79fb\u6027\u80fd\u589e\u52a0\u4e86\u7ea6\u4e24\u4e2a\u6570\u91cf\u7ea7\uff0c\u8fd9\u4e9b\u7269\u7406\u7279\u6027\u90fd\u6709\u5229\u4e8e\u63d0\u5347\u5668\u4ef6\u7684\u53ef\u9760\u6027\u3002\u91c7\u7528\u94dc\u5f15\u7ebf\u53d6\u4ee3\u4f20\u7edf\u7684\u94dd\u5f15\u7ebf\u5b9e\u73b0\u952e\u5408\u4e92\u8fde\uff0c\u76f8\u540c\u7ebf\u5f84\u7684\u94dc\u5f15\u7ebf\u8f7d\u6d41\u80fd\u529b\u53ef\u4ee5\u63d0\u9ad870%\uff0c\u662fIGBT \u6280\u672f\u53d1\u5c55\u65b9\u5411\uff0c\u5c24\u5176\u662f\u5728\u8f68\u9053\u4ea4\u901a\u3001\u7535\u529b\u7cfb\u7edf\u7b49\u9ad8\u7aef\u5e94\u7528\u9886\u57df\u3002<\/span><\/h1>\n<\/h2>\n2\u3001\u82af\u7247\u7684\u94dc\u91d1\u5c5e\u5316<\/strong><\/span><\/h2>\n\u8981\u5b9e\u73b0\u94dc\u5f15\u7ebf\u7684\u4e92\u8fde\uff0c\u9996\u5148\u5fc5\u987b\u786e\u4fdd\u82af\u7247\u8868\u9762\u7684\u91d1\u5c5e\u5316\u7535\u6781\u662f\u94dc\uff0c\u56e0\u6b64\u82af\u7247\u94dc\u91d1\u5c5e\u5316\u662f\u94dc\u5f15\u7ebf\u952e\u5408\u4e92\u8fde\u7684\u57fa\u7840\u3002\u7531\u4e8e\u94dc\u6bd4\u94dd\u7535\u963b\u7387\u66f4\u4f4e\u4e14\u5bfc\u70ed\u7cfb\u6570\u8f83\u9ad8\uff0c\u56e0\u800c\u82af\u7247\u8868\u9762\u7684\u539a\u94dc\u91d1\u5c5e\u5c42\u6709\u5229\u4e8e\u964d\u4f4e\u82af\u7247\u901a\u6001\u635f\u8017\u3001\u63d0\u9ad8\u82af\u7247\u8868\u9762\u70ed\u5bb9\u5e76\u6539\u5584\u6563\u70ed\u73af\u5883\uff0c<\/span>\u94dc\u5de5\u827aFRD \u82af\u7247\u7684\u8fd0\u884c\u97e7\u6027\u8f83\u94dd\u5de5\u827a\u82af\u7247\u6709\u5927\u5e45\u63d0\u5347\u3002<\/span><\/span><\/span><\/h1>\n<\/h1>\n\u94dc\u79bb\u5b50\u5728\u82af\u7247\u5185\u90e8\u662f\u4e00\u79cd\u6709\u5bb3\u6742\u8d28\u4ee5\u53ca\u5de5\u827a\u5e73\u53f0\u517c\u5bb9\u6027\u7b49\u95ee\u9898\uff0c\u963b\u788d\u4e86\u94dc\u5de5\u827a\u5728IGBT \u7b49\u529f\u7387\u5668\u4ef6\u5236\u9020\u4e2d\u7684\u5e94\u7528\u53d1\u5c55\u3002\u56e0\u6b64\uff0c\u4e3a\u4e86\u9632\u8303\u94dc\u91d1\u5c5e\u79bb\u5b50\u8fdb\u5165\u82af\u7247\u5185\u90e8\uff0c\u987b\u5728\u94dc\u91d1\u5c5e\u5c42\u4e0e\u7845\u82af\u7247\u4e4b\u95f4\u5f15\u5165\u4e00\u5c42\u963b\u6321\u5c42\u3002\u96be\u7194\u91d1\u5c5e\u53ca\u5176\u6c2e\u5316\u7269\u5982W\u3001Ti\/TiN\u3001Ta\/TaN \u7b49\uff0c\u7531\u4e8e\u5176\u826f\u597d\u7684\u5bfc\u7535\u6027\u3001\u70ed\u7a33\u5b9a\u6027\u7b49\u4f18\u70b9\u88ab\u89c6\u4e3a\u7406\u60f3\u7684\u963b\u6321\u5c42\u6750\u6599\u3002<\/span><\/span><\/span><\/section>\n
<\/p>\n\u56fe \u94dc\u91d1\u5c5e\u5316\u00a0IGBT\u00a0\u82af\u7247\u622a\u9762<\/span><\/section>\n\u91d1\u5c5e\u53ca\u5176\u6c2e\u5316\u7269\u7684\u590d\u5408\u7ed3\u6784\uff0c\u5982Ti\/TiN\u3001Ta\/TaN \u7b49\u7ed3\u6784\u66f4\u4e3a\u81f4\u5bc6\uff0c\u5bf9\u94dc\u79bb\u5b50\u7684\u963b\u6321\u6548\u679c\u66f4\u597d\uff0c\u5728\u963b\u6321\u5c42\u4e0a\u901a\u8fc7PVD \u6c89\u79ef\u4e00\u5c42\u8584Cu \u4f5c\u4e3a\u7535\u9540\u7684\u7c7d\u6676\u5c42\uff0c\u7136\u540e\u518d\u8fdb\u884c\u539a\u94dc\u7535\u9540\u3002\u4e3a\u4e86\u9632\u6b62\u94dc\u7684\u6c27\u5316\uff0c\u8868\u9762\u518d\u6c89\u79ef\u8584\u5c42\u6297\u6c27\u5316\u7684\u91d1\u5c5e\uff0c\u5982Ni\/Pd\/Au \u7b49\u3002<\/span><\/section>\n\u82af\u7247\u94dc\u91d1\u5c5e\u5316\u57fa\u4e8e\u4f20\u7edf\u94dd\u5de5\u827a\u6d41\u7a0b\uff0c\u4f46\u6bd4\u94dd\u91d1\u5c5e\u5316\u5de5\u827a\u8981\u590d\u6742\u5f88\u591a\uff0c\u4e0d\u4ec5\u9700\u8981\u6539\u53d8\u8868\u9762\u91d1\u5c5e\u6750\u6599\u4e0e\u7ed3\u6784\uff0c\u800c\u4e14\u6d41\u7a0b\u66f4\u957f\uff0c\u5176\u5de5\u827a\u6d41\u7a0b\u5982\u4e0b\u56fe\u6240\u793a\u3002<\/span><\/section>\n<\/section>\n
<\/p>\n\u56fe\u00a0IGBT\u00a0\u82af\u7247\u94dc\u91d1\u5c5e\u5316\u5de5\u827a\u6d41\u7a0b<\/span><\/section>\n\u7531\u4e8e\u591a\u5c42\u91d1\u5c5e\u7ed3\u6784\u6750\u6599\u4e4b\u95f4\u70ed\u81a8\u80c0\u7cfb\u6570\u5931\u914d\u4f1a\u4ea7\u751f\u5e94\u529b\u5dee\uff0c\u4ece\u800c\u589e\u52a0\u6676\u5706\u7fd8\u66f2\u5ea6\uff0c\u964d\u4f4e\u6676\u5706\u52a0\u5de5\u8fc7\u7a0b\u4e2d\u7684\u826f\u54c1\u7387\u3002\u56e0\u6b64\uff0c\u94dc\u7535\u9540\u53ca\u5176\u540e\u7eed\u9000\u706b\u5de5\u827a\u7684\u8fc7\u7a0b\u63a7\u5236\u5bf9\u51cf\u5c0f\u6676\u5706\u5185\u90e8\u5e94\u529b\u4e0d\u5e73\u8861\u800c\u5f15\u8d77\u7684\u6676\u5706\u7fd8\u66f2\u5ea6\u81f3\u5173\u91cd\u8981\u3002<\/span><\/section>\n<\/section>\n<\/section>\n3\u3001\u94dc\u7aef\u5b50\u8d85\u58f0\u710a\u63a5<\/strong><\/span><\/h2>\n\u7ecf\u8fc7IGBT \u82af\u7247\u7ea7\u3001\u886c\u677f\u7ea7\u5e76\u8054\u540e\uff0c\u901a\u8fc7\u94dc\u7aef\u5b50\u6c47\u6d41\u540e\u5f15\u51fa\u6765\uff0c\u4e0e\u5916\u90e8\u7535\u8def\u5f62\u6210\u7535\u6c14\u8fde\u63a5\uff0c\u56e0\u6b64\u5728\u5927\u529f\u7387\u6a21\u5757\u4e2d\uff0c\u6bcd\u7ebf\u7aef\u5b50\u710a\u63a5\u70b9\u662f\u7535\u6d41\u4e0e\u70ed\u91cf\u6700\u96c6\u4e2d\u7684\u5730\u65b9\uff0c\u4e5f\u662f\u5931\u6548\u7387\u6bd4\u8f83\u9ad8\u7684\u8584\u5f31\u73af\u8282\u4e4b\u4e00\u3002<\/span><\/section>\n<\/section>\n<\/section>\n\u4f20\u7edf\u529f\u7387\u7aef\u5b50\u4e92\u8fde\u91c7\u7528\u710a\u6599\u710a\u63a5\u5de5\u827a\uff0c\u5176\u4e0d\u8db3\u5728\u4e8e\u7535\/\u70ed\u63a5\u89e6\u963b\u6297\u8f83\u5927\uff0c\u6e29\u5ea6\u9ad8\u4e14\u5206\u5e03\u4e0d\u5747\u5300\u3002\u91c7\u7528\u8d85\u58f0\u710a\u63a5\u6280\u672f\uff0c\u6d88\u9664\u4e86\u4f20\u7edf\u710a\u6599\u710a\u63a5\u5b58\u5728\u7684\u56e0\u4e0d\u540c\u6750\u6599\u70ed\u81a8\u80c0\u7cfb\u6570\u5931\u914d\u3001\u957f\u671f\u70ed\u75b2\u52b3\u800c\u5f15\u8d77\u7684\u710a\u63a5\u754c\u9762\u9000\u5316\u3002<\/span><\/section>\n<\/section>\n\n\u56fe\u00a0\u8d85\u58f0\u710a\u63a5\u4e0e\u710a\u6599\u8fde\u63a5\u7684\u6a21\u5757\u5bc4\u751f\u7535\u963b\u5bf9\u6bd4<\/span><\/section>\n\u91c7\u7528\u8d85\u58f0\u710a\u63a5\u8fde\u63a5\u7684\u6bcd\u7ebf\u56e0\u6d88\u9664\u4e86\u710a\u6599\u5c42\u4ea7\u751f\u7684\u63a5\u89e6\u7535\u963b\u5f71\u54cd\uff0c\u6709\u5229\u4e8e\u964d\u4f4e\u5bc4\u751f\u7535\u963b\u5bfc\u901a\u635f\u8017\uff1b\u91c7\u7528<\/span>\u8d85\u58f0\u710a\u63a5\u7684<\/span>\u7aef\u5b50\u710a\u63a5\u5f3a\u5ea6\u7a33\u5b9a\u6027\uff0c\u5177\u6709\u826f\u597d\u7684\u673a\u68b0\u5f3a\u5ea6\u548c\u7535\/\u70ed\u63a5\u89e6\u72b6\u6001<\/span>\u3002<\/span><\/span><\/section>\n<\/section>\n
<\/section>\n\u56fe \u4e0d\u540c\u710a\u63a5\u5de5\u827a\u6bcd\u7ebf\u7aef\u5b50\u526a\u5207\u5f3a\u5ea6\u6bd4\u8f83<\/span><\/section>\n\u4e0e\u4f20\u7edf\u94dd\u5de5\u827a\u6280\u672f\u76f8\u6bd4\uff0c\u94dc\u5de5\u827aIGBT \u6a21\u5757\u5177\u6709\u66f4\u4f4e\u7684\u901a\u6001\u635f\u8017\u3001\u66f4\u9ad8\u6297\u6d6a\u6d8c\u7535\u6d41\u80fd\u529b\u548c\u66f4\u957f\u529f\u7387\u5faa\u73af\u5bff\u547d\uff0c\u66f4\u9002\u5408\u4e8e\u5de5\u51b5\u6076\u52a3\u7684\u7275\u5f15\u53d8\u6d41\u5668\u7b49\u5e94\u7528\u9886\u57df\u3002<\/span><\/section>\n\u6587\u7ae0\u6765\u6e90\uff1a\u5218\u56fd\u53cb, \u7f57\u6d77\u8f89, \u5f20\u9e3f\u946b, \u738b\u5f66\u521a, \u6f58\u662d\u6d77. \u57fa\u4e8e\u5168\u94dc\u5de5\u827a\u7684750A\/6500V\u9ad8\u6027\u80fdIGBT\u6a21\u5757[J]. \u7535\u5de5\u6280\u672f\u5b66\u62a5, 2020, 35(21): 4501-4510.<\/span><\/section>\n\n
\n
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<\/p>\n\u56fe\u00a0\u94dd\u5f15\u7ebf\u952e\u5408\u70b9\u529f\u7387\u5faa\u73af\u540e\u5931\u6548<\/span><\/section>\n<\/h1>\n\u76ee\u524d\u5927\u529f\u7387\u6a21\u5757\u5c01\u88c5\u4e3b\u8981\u91c7\u7528\u94dd\u7ebf\u6216\u94dd\u5e26\u6750\u6599\uff0c\u901a\u8fc7\u8d85\u58f0\u952e\u5408\u5de5\u827a\u6765\u5b9e\u73b0\u82af\u7247\u4e4b\u95f4\u7684\u4e92\u8fde\u3002\u5728\u957f\u671f\u529f\u7387\u5faa\u73af\u8fc7\u7a0b\u4e2d\uff0c\u94dd\u5f15\u7ebf\u4e0e\u82af\u7247\u952e\u5408\u70b9\u6839\u90e8\u9644\u8fd1\u4f1a\u51fa\u73b0\u5f00\u88c2\u73b0\u8c61\u3002<\/span><\/span>\u94dd\u7684\u70ed\u81a8\u80c0\u7cfb\u6570\u6bd4\u94dc\u9ad850%\uff0c\u94dd\u7845\u4e4b\u95f4\u70ed\u81a8\u80c0\u7cfb\u6570\u5931\u914d\u66f4\u4e25\u91cd\uff0c\u91c7\u7528\u7845\u94dd\u5408\u91d1\uff081.2% Si-2%Al\uff09\u53ef\u4ee5\u5728\u4e00\u5b9a\u7a0b\u5ea6\u4e0a\u6539\u5584\u4e24\u79cd\u6750\u6599\u7684\u70ed\u81a8\u80c0\u7cfb\u6570\u5931\u914d\u800c\u5f15\u8d77\u7684\u6750\u6599\u6027\u80fd\u9000\u5316\uff0c\u540c\u65f6\u6539\u5584\u6297\u7535\u8fc1\u79fb\u80fd\u529b\u548c\u952e\u5408\u8d28\u91cf\uff0c\u4f46\u7845\u94dd\u5408\u91d1\u4f1a\u5f71\u54cd\u5bfc\u7535\u3001\u5bfc\u70ed\u6027\u80fd\uff1b\u901a\u8fc7\u63d0\u9ad8\u952e\u5408\u5f3a\u5ea6\uff0c\u53ef\u4ee5\u6539\u5584\u952e\u5408\u70b9\u7684\u7ed3\u5408\u8d28\u91cf\uff0c\u4f46\u5b58\u5728\u82af\u7247\u635f\u5bb3\u7684\u98ce\u9669\u3002<\/span><\/section>\n
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<\/section>\n\u56fe \u4e0d\u540c\u710a\u63a5\u5de5\u827a\u6bcd\u7ebf\u7aef\u5b50\u526a\u5207\u5f3a\u5ea6\u6bd4\u8f83<\/span><\/section>\n\u4e0e\u4f20\u7edf\u94dd\u5de5\u827a\u6280\u672f\u76f8\u6bd4\uff0c\u94dc\u5de5\u827aIGBT \u6a21\u5757\u5177\u6709\u66f4\u4f4e\u7684\u901a\u6001\u635f\u8017\u3001\u66f4\u9ad8\u6297\u6d6a\u6d8c\u7535\u6d41\u80fd\u529b\u548c\u66f4\u957f\u529f\u7387\u5faa\u73af\u5bff\u547d\uff0c\u66f4\u9002\u5408\u4e8e\u5de5\u51b5\u6076\u52a3\u7684\u7275\u5f15\u53d8\u6d41\u5668\u7b49\u5e94\u7528\u9886\u57df\u3002<\/span><\/section>\n\u6587\u7ae0\u6765\u6e90\uff1a\u5218\u56fd\u53cb, \u7f57\u6d77\u8f89, \u5f20\u9e3f\u946b, \u738b\u5f66\u521a, \u6f58\u662d\u6d77. \u57fa\u4e8e\u5168\u94dc\u5de5\u827a\u7684750A\/6500V\u9ad8\u6027\u80fdIGBT\u6a21\u5757[J]. \u7535\u5de5\u6280\u672f\u5b66\u62a5, 2020, 35(21): 4501-4510.<\/span><\/section>\n\n
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