{"id":242778,"date":"2023-08-11T09:15:23","date_gmt":"2023-08-11T01:15:23","guid":{"rendered":"https:\/\/www.cmpe360.com\/?p=242778"},"modified":"2023-08-11T09:15:52","modified_gmt":"2023-08-11T01:15:52","slug":"44f62dae0c","status":"publish","type":"post","link":"https:\/\/www.cmpe360.com\/p\/242778","title":{"rendered":"\u534e\u5929eSiFO\u5c01\u88c5\u6280\u672f"},"content":{"rendered":"
\n
\u827e\u90a6\u534a\u5bfc\u4f53\u7f51\u5728\u4e4b\u524d\u4ecb\u7ecd\u8fc7\u6676\u5706\u7ea7\u548c\u9762\u677f\u7ea7\u7684\u6247\u51fa\u578b\u5c01\u88c5\uff0c\u5305\u62eceWLB, M Series\u7b49\u5c01\u88c5\u6280\u672f\u3002\u5728\u8fd9\u91cc\u6211\u4eec\u6765\u4ecb\u7ecd\u53e6\u4e00\u4e2a\u884d\u751f\u7248\u672c:\u5929\u6c34\u534e\u5929\u57282015\u5e74\u63a8\u51fa\u4e86eSiFO(Embedded Silicon Fan-Out)\u6280\u672f\uff0c\u7845\u6676\u5706\u523b\u8680\u540e\uff0c\u6676\u7247\u9010\u9897\u653e\u5165\uff0c\u968f\u540e\u88ab\u5c01\u8d77\u6765\uff0ceSiFO\u5c5e\u4e8eChip-first Die Face-up\u5de5\u827a\u3002\u534e\u5929\u7684\u8be5\u65b9\u6848\u7ed3\u5408\u4e86\u9ad8\u7cbe\u5ea6\u7845\u523b\u8680\uff0c\u6676\u5706\u91cd\u6784\uff0c\u9ad8\u5bc6\u5ea6\u518d\u5e03\u7ebf\u7b49\u6280\u672f\uff0c\u5177\u6709\u591a\u82af\u7247\u9ad8\u5bc6\u5ea6\u7cfb\u7edf\u96c6\u6210\uff0c\u5c0f\u578b\u5316\uff0c\u7fd8\u66f2\u5c0f\uff0c\u9002\u4e8e\u591a\u82af\u7247\u548c\u4e09\u7ef4\u96c6\u6210\u7b49\u7a81\u51fa\u7279\u70b9\u3002\u9605\u8bfb\u672c\u6587\u524d\u6b22\u8fce<\/span>\u52a0\u5165\u827e\u90a6\u534a\u5bfc\u4f53\u5c01\u88c5\u4ea7\u4e1a\u94fe\u4ea4\u6d41\u7fa4\u3002<\/span><\/section>\n
\n
\"\u534e\u5929eSiFO\u5c01\u88c5\u6280\u672f\"<\/section>\n<\/section>\n
\n
<\/section>\n<\/section>\n
\u56fe\u4e00\u7ed9\u51fa\u4e86\u534e\u5929\u7684eSiFO\u8ddf\u4e4b\u524d\u4ecb\u7ecd\u8fc7\u7684eWLB\u6280\u672f\u7ed3\u6784\u76f8\u6bd4\u8f83\uff0c\u53ef\u4ee5\u770b\u51fa\u7ed3\u6784\u662f\u975e\u5e38\u76f8\u4f3c\u7684\u3002\u6700\u5927\u7684\u4e0d\u540c\u5728\u4e8eeSiFO\u5c06\u5851\u5c01\u6599\uff08EMC epoxy molding compound\uff09\u6539\u4e3asilicon\u3002\u7528\u7845\u7247\u4f5c\u4e3a\u627f\u8f7d\uff0c\u53ef\u4ee5\u5f88\u597d\u5730\u89e3\u51b3EMC\u65b9\u6848\u7684\u591a\u4e2a\u75db\u70b9\uff1a<\/section>\n

1.\u5927\u5927\u964d\u4f4eCTE mismatch\u5e26\u6765\u7684\u7fd8\u66f2\uff0c\u964d\u4f4e\u5185\u90e8\u5e94\u529b<\/p>\n

2.\u7845\u7684mechanical modulus\u4e5f\u6bd4EMC\u8981\u5f3a\uff0c\u6240\u4ee5\u4e5f\u80fd\u964d\u4f4e\u7fd8\u66f2\uff0c\u4ece\u800c\u964d\u4f4e\u5c01\u88c5\u96be\u5ea6\uff0c\u63d0\u5347\u826f\u54c1\u7387\uff1b<\/section>\n
3.\u7845\u7684\u70ed\u5bfc\u6027\u80fd\u4e5f\u8fdc\u9ad8\u4e8eEMC\uff0c\u8fd9\u5927\u5927\u63d0\u5347\u4e86\u6574\u4e2apackage\u7684\u6563\u70ed\u80fd\u529b\uff1b<\/section>\n
4.\u5728\u7845\u4e2d\u505a\u901a\u5b54\u7684\u5bc6\u5ea6\u8981\u8fdc\u5927\u4e8e\u5728EMC\u4e2d\u7684\u901a\u5b54\u5bc6\u5ea6\uff0c\u4e5f\u5c31\u662f\u8bf4TSV\uff08through silicon via\uff09\u8981\u6bd4TMV\uff08through mold via\uff09\u66f4\u5bb9\u6613\u505a\u5230\u9ad8\u5bc6\u5ea6\uff0c\u9ad8\u6df1\u5bbd\u6bd4\u7b49\uff1b<\/section>\n
5.\u7fd8\u66f2\u5c0f\u4e5f\u4f7f\u5f97SMT\u66f4\u5bb9\u6613\uff1b<\/section>\n
6.\u7845\u627f\u8f7d\u7247\u6bd4EMC\u7684\u8868\u9762\u66f4\u52a0\u5e73\u6574\uff0c\u52a0\u4e0a\u7fd8\u66f2\u5c0f\uff0c\u53ef\u4ee5\u505a\u66f4\u9ad8\u5bc6\u5ea6\u7684\u91cd\u5e03\u7ebf\u5c42RDL\uff1b<\/section>\n
7.\u6574\u4e2apackage\u7684\u539a\u5ea6\u53ef\u4ee5\u505a\u5f97\u66f4\u8584\uff0c\u8fd9\u5bf9\u79fb\u52a8\u7aef\u7684\u5e94\u7528\u975e\u5e38\u6709\u5438\u5f15\u529b\uff1b<\/section>\n
8.\u76f8\u6bd4\u4e8eeWLB Die shift\u4f1a\u66f4\u5c0f, \u66f4\u9002\u5408\u591a\u82af\u7247\u96c6\u6210\u3002<\/section>\n
\"\u534e\u5929eSiFO\u5c01\u88c5\u6280\u672f\"<\/section>\n
\u56fe\u4e00\uff1a\u534e\u5929\u7684eSiFO\u8ddfeWLB \u7ed3\u6784\u6bd4\u8f83<\/span><\/section>\n
\u5c3d\u7ba1\u534e\u5929\u5728\u591a\u4e2a\u573a\u5408\u5ba3\u79f0\u76f8\u6bd4\u4e8eeWLB\u4ed6\u4eec\u7684eSiFO\u65b9\u6848\u5de5\u5e8f\u66f4\u7b80\u5355\uff0c\u6210\u672c\u4e5f\u66f4\u4f4e\u3002\u7b14\u8005\u6301\u6709\u4e0d\u540c\u7684\u770b\u6cd5\uff0c\u76ee\u524deSiFO\u4e5f\u53ea\u662f\u5728\u7535\u5bb9\u5f0f\u6307\u7eb9\u4f20\u611f\u5668\u7b49\u5c11\u6570\u9886\u57df\u5f97\u5230\u5e94\u7528\uff0c\u5e76\u6ca1\u6709\u5927\u89c4\u6a21\u666e\u53ca\u3002\u7b14\u8005\u8ba4\u4e3aeSiFO\u5de5\u827a\u66f4\u590d\u6742\uff0c\u6280\u672f\u96be\u5ea6\u66f4\u5927\uff0c\u6210\u672c\u4e5f\u4e0d\u4f1a\u4f4e\u3002\u8fd9\u4e2a\u6280\u672f\u65b9\u6848\u80fd\u4e0d\u80fd\u5927\u89c4\u6a21\u5e94\u7528\u53d6\u51b3\u4e8e\u8bf8\u591a\u65b9\u9762\uff0c\u6bd4\u5982\u6280\u672f\u65b9\u6848\u80fd\u4e0d\u80fd\u8fdb\u4e00\u6b65\u964d\u6210\u672c\u5e76\u63d0\u5347\u6027\u80fd\uff0c\u4ee5\u53ca\u80fd\u4e0d\u80fd\u5f00\u53d1\u51fa\u9002\u5408\u8be5\u65b9\u6848\u7684\u4ea7\u54c1\u5e94\u7528\u3002<\/section>\n
\"\u534e\u5929eSiFO\u5c01\u88c5\u6280\u672f\"<\/section>\n
\u56fe\u4e8c\uff1a\u534e\u5929\u7684eSiFO\u7684\u5de5\u827a\u6d41\u7a0b\u6b65\u9aa4<\/span><\/section>\n
\u63a5\u4e0b\u6765\u6211\u4eec\u6765\u4ecb\u7ecd\u4e00\u4e0b\u534e\u5929\u7684eSiFO\u7684\u5927\u4f53\u6d41\u7a0b\u5de5\u827a\uff0c\u5982\u56fe\u4e8c\u6240\u793a\u3002<\/section>\n

1.8\u5bf8\u6216\u800512\u5bf8\u6676\u5706\u6e05\u6d17<\/p>\n

2.Bosch\u5de5\u827a\u6765\u5236\u9020\u76f4\u69fd<\/p>\n

3.\u82af\u7247\u6676\u5706\u51cf\u8584\u629b\u5149<\/p>\n

4.\u82af\u7247\u6676\u5706\u80cc\u9762\u6d82\u6577DAF\u819c\uff08\u56fe\u4e2d\u84dd\u8272\u90e8\u5206\uff09\u3002\u53d6\u51b3\u4e8e\u4ea7\u54c1\u5e94\u7528\uff0c\u4e5f\u53ef\u4ee5\u7528\u9ad8\u70ed\u5bfc\u7684\u819c\u6216\u8005\u80f6\u6765\u63d0\u9ad8\u6563\u70ed\u6027\u80fd\uff0c DAF\u7684\u539a\u5ea6\u901a\u5e38\u572810-25\u5fae\u7c73<\/p>\n

5.\u82af\u7247\u6676\u5706\u5207\u5272<\/p>\n

6.\u82af\u7247\u8d34\u7247\uff0c\u9700\u8981\u9ad8\u7cbe\u5ea6\u9ad8\u901f\u8d34\u7247\u673a\u6765\u5b8c\u6210\u6b64\u9879\u4efb\u52a1\u3002DAF\u662f\u53ef\u88ab\u538b\u7f29\u7684\uff0c\u6240\u4ee5\u76f4\u69fd\u6df1\u5ea6\u548c\u82af\u7247\u539a\u5ea6\u7684\u5dee\u522b\u5728\u4e00\u5b9a\u7a0b\u5ea6\u4e0a\u53ef\u4ee5\u901a\u8fc7\u63a7\u5236DAF\u88ab\u538b\u7f29\u540e\u7684\u539a\u5ea6\u6765\u8c03\u8282<\/p>\n

7.DAF\u70d8\u70e4\u56fa\u5316<\/p>\n

8.\u771f\u7a7a\u538b\u819c\u673a\u586b\u5145\u82af\u7247\u548c\u6c9f\u69fd\u4e4b\u95f4\u7684\u7f1d\u9699\u3002\u8fd9\u4e00\u6b65\u9aa4\u5f80\u5f80\u4e5f\u540c\u65f6\u5728\u91cd\u5efa\u6676\u5706\u8868\u9762\u5f62\u6210\u949d\u5316\u5c42\u3002\u586b\u5145\u6750\u6599\u7684\u9009\u62e9\u81f3\u5173\u91cd\u8981\uff0c\u5176CTE\uff0cDk\/Df\u7b49\u6027\u80fd\u76f4\u63a5\u5f71\u54cd\u82af\u7247\u7684CTE mismatch\uff0c\u7fd8\u66f2\uff0c\u7535\u635f\u8017\uff0c\u5e26\u5bbd\u7b49\u3002\u8be5\u6750\u6599\u901a\u5e38\u9700\u8981\u53ef\u5149\u523b\uff0c\u4f4e\u81a8\u80c0\u7cfb\u6570\uff0c\u4f4e\u4ecb\u7535\u5e38\u6570\u3002\u5e72\u819c\u662f\u5e38\u7528\u7684\u6750\u6599<\/p>\n

9.\u5f62\u6210\u7b2c\u4e00\u91cd\u5e03\u5c42\uff08RDL1\uff09\uff0c\u901a\u5e38\u4f7f\u7528SAP(semi additive process)\u5de5\u827a\u6d41\u7a0b\u6765\u5b8c\u6210\uff0c\u53ef\u53c2\u7167\u6211\u4eec\u4e4b\u524d\u7684\u6587\u7ae0\u3002\u7531\u4e8e\u7845\u627f\u8f7d\u7247\u4f18\u4e8eEMC, \u6240\u4ee5RDL\u7684\u5236\u9020\u4e5f\u76f8\u5bf9\u5bb9\u6613\u4e9b\uff0c\u7ebf\u8ddd\u7ebf\u5bbd\u4e5f\u53ef\u4ee5\u505a\u5230\u66f4\u5c0f<\/p>\n

10.\u53d6\u51b3\u4e8e\u4ea7\u54c1\u6027\u80fd\u9700\u6c42\uff0c\u5236\u9020\u66f4\u591a\u5c42\u7684RDL<\/p>\n

11.Surface finish\uff0cLGA\u548cBGA\u90fd\u80fd\u5b9e\u73b0\u3002\u56fe\u4e09\u7ed9\u51fa\u4e86\u4e00\u4e2a\u5e94\u7528\u4f8b\u5b50<\/p>\n

12.\u7845\u627f\u8f7d\u7247\u4e5f\u53ef\u4ee5\u6839\u636e\u9700\u8981\u8fdb\u884c\u51cf\u8584\u6765\u964d\u4f4e\u6574\u4e2a\u82af\u7247\u7684\u539a\u5ea6<\/p>\n

13.\u6574\u4e2a\u6676\u5706singulation<\/p>\n

14.\u6d4b\u8bd5\u540e\u653e\u5165\u67d0\u79cdcarrier media\uff0c\u6bd4\u5982tape reel\u91cc<\/section>\n
\u901a\u5e38\u76f4\u69fd\u6df1\u5ea6\u5728100\u5fae\u7c73\u5de6\u53f3\uff0c\u6574\u4e2a\u6676\u5706\u76f4\u69fd\u7684\u6df1\u5ea6\u53d8\u5316\u91cf\u4e0d\u80fd\u8d85\u8fc75-10\u5fae\u7c73\u3002\u4e0d\u540c\u82af\u7247\uff08\u5305\u542bDAF\uff09\u7684\u539a\u5ea6\u4e5f\u8981\u6c42\u6709\u6bd4\u8f83\u5c0f\u7684\u53d8\u5316\u3002\u8bbe\u8ba1\u76ee\u6807\u662f\u82af\u7247\u7684\u8868\u9762\u8ddf\u7845\u627f\u8f7d\u7247\u8868\u9762\u9f50\u5e73\u3002\u5927cavity\u52a0\u4e0a\u9ad8\u7cbe\u5ea6\u8981\u6c42\u4f7f\u5f97Bosch\u5de5\u827a\u6bd4\u8f83\u6709\u6311\u6218\u6027\u3002\u76ee\u524d\u5d4c\u5165\u7684\u82af\u7247\u4e00\u822c\u572815 mm x 15 mm\u4ee5\u4e0b\u3002\u76f4\u69fd\u7684\u957f\u5bbd\u90fd\u53ea\u6bd4\u82af\u7247\u7684\u5c3a\u5bf8\u592740-50\u5fae\u7c73\u3002\u76f4\u69fd\u7684\u5e95\u90e8\u548c\u4fa7\u58c1\u90fd\u8981\u6c42\u6bd4\u8f83\u5e73\u6574\u3002\u8f83\u4f4e\u7684Bosch\u523b\u8680\u901f\u7387\u53ef\u4ee5\u53d6\u5f97\u4f4e\u4e8e1\u5fae\u7c73\u7684\u8868\u9762\u7c97\u7cd9\u5ea6\u3002<\/section>\n
<\/section>\n
\u56fe\u4e09\uff1a\u534e\u5929\u57fa\u4e8eeSiFO\u6280\u672f\u7684\u7535\u5bb9\u5f0f\u6307\u7eb9\u4f20\u611f\u5668\u6676\u5706\u5c01\u88c5\u540e\u5916\u89c2<\/span><\/section>\n
\u7528\u7845\u505a\u627f\u8f7d\u7247\u7684\u53e6\u4e00\u4e2a\u4f18\u52bf\u662f\u53ef\u4ee5\u505aTSV\u7528\u4e8e\u4e0a\u4e0b\u5782\u76f4\u4e92\u8054\uff0c\u5982\u56fe\u56db\u6240\u793a\u3002\u5728\u505a\u76f4\u69fd\u65f6\uff0c\u6211\u4eec\u4e5f\u53ef\u4ee5\u540c\u6837\u91c7\u7528Bosch\u6cd5\u5236\u9020TSV\u901a\u5b54\u3002\u4f7f\u7528PECVD\u6c89\u79ef\u5236\u4f5c\u7edd\u7f18\u5c42\u3001\u4f7f\u7528\u7269\u7406\u6c14\u76f8\u6c89\u79ef\u7684\u65b9\u6cd5\u6c89\u79ef\u5236\u4f5c\u963b\u6321\u5c42(\u901a\u5e38\u662f300 nm\u7684\u949b\u5c42)\u548c\u79cd\u5b50\u5c42(\u901a\u5e38\u662f500 nm\u7684\u94dc\u5c42)\uff1b\u9009\u62e9\u4e00\u79cd\u7535\u9540\u65b9\u6cd5\u5728\u76f2\u5b54\u4e2d\u8fdb\u884c\u94dc\u586b\u5145\uff1b\u4f7f\u7528\u5316\u5b66\u548c\u673a\u68b0\u629b\u5149\uff08CMP\uff09\u6cd5\u53bb\u9664\u591a\u4f59\u7684\u94dc\u3002\u5bf9\u4e8e\u4f4e\u7535\u6d41\u5e94\u7528\u573a\u666f\uff0cTSV\u4e2d\u5fc3\u4e5f\u53ef\u4ee5\u4f7f\u7528polymer\u6765\u586b\u5145\u3002<\/section>\n
\u4f7f\u7528\u56fe\u4e8c\u4e2d\u7c7b\u4f3c\u7684\u5de5\u827a\u6d41\u7a0b\u53ef\u4ee5\u5b8c\u6210\u4e0a\u9762\u7684RDL\u548c\u8868\u9762\u690d\u7403\u3002\u63a5\u4e0b\u53bb\u91c7\u7528\u4e34\u65f6\u952e\u5408\u6280\u672f\uff08\u901a\u5e38\u91c7\u7528\u6fc0\u5149\u89e3\u952e\u5408\uff09\u5b8c\u6210\u80cc\u9762\u5de5\u827a\u3002\u5c06\u6676\u5706\u4e34\u65f6\u952e\u5408\u5230\u73bb\u7483\u8f7d\u4f53\u4e0a\u7136\u540e\u51cf\u8584\u81f3\u76ee\u6807\u539a\u5ea6\uff0c\u4f7f\u5f97TSV\u88f8\u9732\u51fa\u6765\u3002\u63a5\u4e0b\u53bb\u5b8c\u6210\u82af\u7247\u4e0b\u8868\u9762\u7684\u91cd\u5e03\u5c42\u548c\u8868\u9762\u690d\u7403\u7b49\u5de5\u827a\u3002<\/section>\n
\"\u534e\u5929eSiFO\u5c01\u88c5\u6280\u672f\"<\/section>\n
\u56fe\u56db\uff1a\u534e\u5929\u57fa\u4e8eeSiFO\u6280\u672f\u548cTSV\u76f8\u7ed3\u5408\u6765\u505a\u82af\u7247\u76843D stacking<\/span><\/section>\n
\u591a\u82af\u7247\u7684eSiFO\u65b9\u6848\u4e5f\u662f\u975e\u5e38\u76f8\u4f3c\u548cstraightforward\uff0c\u5728\u8fd9\u91cc\u6211\u4eec\u4e0d\u518d\u8d58\u8ff0\u3002\u603b\u7ed3\u6765\u8bb2\uff0ceSiFO\u65b9\u6848\u662f\u4e00\u79cd\u975e\u5e38\u4e0d\u9519\u7684\u5c1d\u8bd5\uff0c\u4f53\u73b0\u4e86\u4e2d\u56fd\u5927\u9646\u575a\u6301\u521b\u65b0\uff0c\u52aa\u529b\u5b9e\u73b0\u6280\u672f\u81ea\u4e3b\u7684\u594b\u6597\u7cbe\u795e\u3002\u800c\u4e14\u67d0\u4e9b\u5bf9\u6210\u672c\u4e0d\u662f\u7279\u522b\u654f\u611f\u4e14\u5bf9\u6027\u80fd\u9700\u8981\u66f4\u9ad8\u7684\u5e94\u7528\u573a\u666f\u6216\u8bb8\u975e\u5e38\u9002\u5408\u91c7\u7528\u8be5\u65b9\u6848\u3002\u9664\u4e86\u7528\u7845\u6765\u66ff\u4ee3EMC\uff0c\u73bb\u7483\u4e5f\u662f\u4e00\u79cd\u4e0d\u9519\u7684\u6750\u6599\uff0c\u53a6\u95e8\u4e91\u5929\u5f00\u53d1\u4e86eGFO\uff0c\u5d4c\u5165\u5f0f\u73bb\u7483\u5c01\u88c5\u6280\u672f\u3002\u76f8\u6bd4\u4e8e\u7845\uff0c\u73bb\u7483\u5728\u67d0\u4e9b\u65b9\u9762\u6027\u80fd\u66f4\u597d\uff0c\u6bd4\u5982\u5176\u7edd\u7f18\u6027\u597d\uff0c\u8fd8\u53ef\u4ee5\u900f\u53ef\u89c1\u5149\uff0c\u5929\u751f\u9002\u5408\u9ad8\u9891\u7684\u5c04\u9891\u5e94\u7528\u548c\u5149\u7535\u5e94\u7528\u3002\u4f46\u662f\u73bb\u7483\u6709\u4e2a\u5de8\u5927\u7684\u95ee\u9898\uff0c\u5c31\u662f\u5bb9\u6613\u88c2\uff0c\u826f\u7387\u662f\u4e2a\u5927\u7684\u6311\u6218\u3002\u827e\u90a6\u534a\u5bfc\u4f53\u5728\u4e4b\u524d\u4e5f\u4ecb\u7ecd\u4e86\u73bb\u7483\u52a0\u5de5\u5de5\u827a\uff0c\u4ee5\u540e\u6709\u673a\u4f1a\u6211\u4eec\u4e5f\u4f1a\u8fdb\u4e00\u6b65\u4ecb\u7ecdeGFO\u65b9\u6848\u3002\u00a0 \u00a0\u00a0<\/span><\/section>\n
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1.Ma, S, C. Wang, F. Zheng, D. Yu, H. Xie, X. Yang, L. Ma, P. Li , W. Liu , J. Yu , J. Goodelle, \u201cDevelopment of Wafer Level Process for the Fabrication of Advanced Capacitive Fingerprint Sensors Using Embedded Silicon Fan-Out (eSiFO\u00ae) Technology\u201d, IEEE\/ECTC Proceedings, May 2019, pp. 28\u201334<\/p>\n<\/section>\n<\/section>\n
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2.Ma, Shuying, et al. \"Embedded silicon fan-out (eSiFO): A promising wafer level packaging technology for multi-chip and 3D system integration.\" 2018 IEEE 68th Electronic Components and Technology Conference (ECTC). IEEE, 2018<\/p>\n<\/section>\n<\/section>\n
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3.Wei, Hao, et al. \"Warpage and Reliability Simulation of Super-Size Embedded Silicon Fan-out (eSiFO) Package with size 40mm\u00d7 40mm.\" 2022 23rd International Conference on Electronic Packaging Technology (ICEPT). IEEE, 2022<\/p>\n<\/section>\n<\/section>\n
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4.Gu, Xiaomin, et al. \"Process development of large size embedded silicon fan-out (eSiFO) package.\" 2020 21st International Conference on Electronic Packaging Technology (ICEPT). IEEE, 2020<\/p>\n<\/section>\n<\/section>\n
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5.Chen, Cheng, et al. \"Reliability of ultra-thin embedded silicon fan-out (eSiFO) package directly assembled on PCB for mobile applications.\" 2018 IEEE 68th Electronic Components and Technology Conference (ECTC). IEEE, 2018<\/span><\/p>\n<\/section>\n<\/section>\n
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6.Yu, Daquan. \"Embedded Silicon Fan\u2010Out (eSiFO\u00ae) Technology for Wafer\u2010Level System Integration.\" Advances in Embedded and Fan\u2010Out Wafer\u2010Level Packaging Technologies (2019): 169-184.<\/p>\n

7.Ma, Shuying, et al. \"Progress and applications of embedded system in chip (eSinC\u00ae) technology.\" 2020 IEEE 70th Electronic Components and Technology Conference (ECTC). IEEE, 2020.<\/p>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n<\/section>\n

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